Qiu Peng, Liu Heng, Zhu Xiao-Li, Tian Feng, Du Meng-Chao, Qiu Hong-Yu, Chen Guan-Liang, Hu Yu-Yu, Kong De-Lin, Yang Jin, Wei Hui-Yun, Peng Ming-Zeng, Zheng Xin-He. Atomic layer deposition and application of group III nitrides semiconductor and their alloysJ. Acta Physica Sinica, 2024, 73(3): 038102. DOI: 10.7498/aps.73.20230832