First-principles study of F adsorption by TiN with its oxide surface in three-dimensional NAND flash memory

Fang Yu-Xuan; Yang Yi; Xia Zhi-Liang; Huo Zong-Liang

doi:10.7498/aps.73.20240254

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Fang Yu-Xuan, Yang Yi, Xia Zhi-Liang, Huo Zong-Liang. First-principles study of F adsorption by TiN with its oxide surface in three-dimensional NAND flash memoryJ. Acta Physica Sinica, 2024, 73(12): 128502. DOI: 10.7498/aps.73.20240254

Citation:

Fang Yu-Xuan, Yang Yi, Xia Zhi-Liang, Huo Zong-Liang. First-principles study of F adsorption by TiN with its oxide surface in three-dimensional NAND flash memoryJ. Acta Physica Sinica, 2024, 73(12): 128502. DOI: 10.7498/aps.73.20240254

Citation:

Fang Yu-Xuan, Yang Yi, Xia Zhi-Liang, Huo Zong-Liang. First-principles study of F adsorption by TiN with its oxide surface in three-dimensional NAND flash memoryJ. Acta Physica Sinica, 2024, 73(12): 128502. DOI: 10.7498/aps.73.20240254