Influence of energetic heavy ion sputtering on lifetime of alloy target

NI Weirong; HUANG Hailong; LU Xiaoyong; WANG Xiaodong

doi:10.7498/aps.74.20240711

NI Weirong, HUANG Hailong, LU Xiaoyong, WANG Xiaodong. Influence of energetic heavy ion sputtering on lifetime of alloy targetJ. Acta Physica Sinica, 2025, 74(1): 010201. DOI: 10.7498/aps.74.20240711

Citation:

NI Weirong, HUANG Hailong, LU Xiaoyong, WANG Xiaodong. Influence of energetic heavy ion sputtering on lifetime of alloy targetJ. Acta Physica Sinica, 2025, 74(1): 010201. DOI: 10.7498/aps.74.20240711

Citation:

NI Weirong, HUANG Hailong, LU Xiaoyong, WANG Xiaodong. Influence of energetic heavy ion sputtering on lifetime of alloy targetJ. Acta Physica Sinica, 2025, 74(1): 010201. DOI: 10.7498/aps.74.20240711