ZHANG Yifan, JIA Wenzhu, TIAN Gangyu, QU Qingyuan, WANG Dengzhi, CAO Xinmin, ZHOU Jian, SONG Yuanhong. Influence of standing wave effect on uniformity of potential distribution between electrodes in large-area capacitively coupled dischargesJ. Acta Physica Sinica, 2025, 74(13): 135208. DOI: 10.7498/aps.74.20250279
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Citation:
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ZHANG Yifan, JIA Wenzhu, TIAN Gangyu, QU Qingyuan, WANG Dengzhi, CAO Xinmin, ZHOU Jian, SONG Yuanhong. Influence of standing wave effect on uniformity of potential distribution between electrodes in large-area capacitively coupled dischargesJ. Acta Physica Sinica, 2025, 74(13): 135208. DOI: 10.7498/aps.74.20250279
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ZHANG Yifan, JIA Wenzhu, TIAN Gangyu, QU Qingyuan, WANG Dengzhi, CAO Xinmin, ZHOU Jian, SONG Yuanhong. Influence of standing wave effect on uniformity of potential distribution between electrodes in large-area capacitively coupled dischargesJ. Acta Physica Sinica, 2025, 74(13): 135208. DOI: 10.7498/aps.74.20250279
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Citation:
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ZHANG Yifan, JIA Wenzhu, TIAN Gangyu, QU Qingyuan, WANG Dengzhi, CAO Xinmin, ZHOU Jian, SONG Yuanhong. Influence of standing wave effect on uniformity of potential distribution between electrodes in large-area capacitively coupled dischargesJ. Acta Physica Sinica, 2025, 74(13): 135208. DOI: 10.7498/aps.74.20250279
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