Numerical investigation of the secondary electron effect in capacitively coupled plasmas driven by ultra-low frequency/radio frequency sources

SHI Hanxu; LI Xinyang; ZHANG Yuru; WANG Younian

doi:10.7498/aps.74.20250341

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SHI Hanxu, LI Xinyang, ZHANG Yuru, WANG Younian. Numerical investigation of the secondary electron effect in capacitively coupled plasmas driven by ultra-low frequency/radio frequency sourcesJ. Acta Physica Sinica, 2025, 74(13): 135203. DOI: 10.7498/aps.74.20250341

Citation:

SHI Hanxu, LI Xinyang, ZHANG Yuru, WANG Younian. Numerical investigation of the secondary electron effect in capacitively coupled plasmas driven by ultra-low frequency/radio frequency sourcesJ. Acta Physica Sinica, 2025, 74(13): 135203. DOI: 10.7498/aps.74.20250341

Citation:

SHI Hanxu, LI Xinyang, ZHANG Yuru, WANG Younian. Numerical investigation of the secondary electron effect in capacitively coupled plasmas driven by ultra-low frequency/radio frequency sourcesJ. Acta Physica Sinica, 2025, 74(13): 135203. DOI: 10.7498/aps.74.20250341