Establishment and validation of three-dimensional simulation model for magnetron sputtering of rotating cylindrical cathode

MA Ziqi; XU Qiang; XIAO Mengran; TANG Shiyi; TAO Zhiqun; YANG Dongjie; AN Xiaokai; LIU Liangliang; CUI Suihan; WU Zhongzhen

doi:10.7498/aps.74.20250570

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MA Ziqi, XU Qiang, XIAO Mengran, TANG Shiyi, TAO Zhiqun, YANG Dongjie, AN Xiaokai, LIU Liangliang, CUI Suihan, WU Zhongzhen. Establishment and validation of three-dimensional simulation model for magnetron sputtering of rotating cylindrical cathodeJ. Acta Physica Sinica, 2025, 74(15): 155202. DOI: 10.7498/aps.74.20250570

Citation:

MA Ziqi, XU Qiang, XIAO Mengran, TANG Shiyi, TAO Zhiqun, YANG Dongjie, AN Xiaokai, LIU Liangliang, CUI Suihan, WU Zhongzhen. Establishment and validation of three-dimensional simulation model for magnetron sputtering of rotating cylindrical cathodeJ. Acta Physica Sinica, 2025, 74(15): 155202. DOI: 10.7498/aps.74.20250570

Citation:

MA Ziqi, XU Qiang, XIAO Mengran, TANG Shiyi, TAO Zhiqun, YANG Dongjie, AN Xiaokai, LIU Liangliang, CUI Suihan, WU Zhongzhen. Establishment and validation of three-dimensional simulation model for magnetron sputtering of rotating cylindrical cathodeJ. Acta Physica Sinica, 2025, 74(15): 155202. DOI: 10.7498/aps.74.20250570