Preparation of 4H-SiC/Ti/TaSi<sub>2</sub>/Pt high-temperature lead electrodes based on secondary sputtering

LU Jing; LI Zhiqiang; LEI Cheng; JIA Pinggang; LIU Shilin; YU Jiangang; LI Yongwei; LIANG Ting

doi:10.7498/aps.74.20250801

Search

x

LU Jing, LI Zhiqiang, LEI Cheng, JIA Pinggang, LIU Shilin, YU Jiangang, LI Yongwei, LIANG Ting. Preparation of 4H-SiC/Ti/TaSi2/Pt high-temperature lead electrodes based on secondary sputteringJ. Acta Physica Sinica, 2025, 74(20): 207101. DOI: 10.7498/aps.74.20250801

Citation:

LU Jing, LI Zhiqiang, LEI Cheng, JIA Pinggang, LIU Shilin, YU Jiangang, LI Yongwei, LIANG Ting. Preparation of 4H-SiC/Ti/TaSi2/Pt high-temperature lead electrodes based on secondary sputteringJ. Acta Physica Sinica, 2025, 74(20): 207101. DOI: 10.7498/aps.74.20250801

Citation:

LU Jing, LI Zhiqiang, LEI Cheng, JIA Pinggang, LIU Shilin, YU Jiangang, LI Yongwei, LIANG Ting. Preparation of 4H-SiC/Ti/TaSi2/Pt high-temperature lead electrodes based on secondary sputteringJ. Acta Physica Sinica, 2025, 74(20): 207101. DOI: 10.7498/aps.74.20250801