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ZHANG Zhihe, LIU Haigang, WANG Yong, TAI Renzhong. Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light sourceJ. Acta Physica Sinica, 2025, 74(20): 200201. DOI: 10.7498/aps.74.20250864
Citation: ZHANG Zhihe, LIU Haigang, WANG Yong, TAI Renzhong. Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light sourceJ. Acta Physica Sinica, 2025, 74(20): 200201. DOI: 10.7498/aps.74.20250864
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Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light source

Acta Phys. Sin., 2025, 74(20): 200201.
DOI: 10.7498/aps.74.20250864
CSTR: 32037.14.aps.74.20250864
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