Influence of lower electrode plate grooves on collective behavior of dust particles in radio-frequency capacitively coupled plasma

DENG Rui; HUANG Yufeng; ZHANG Yifan; ZHANG Yingying; SONG Yuanhong

doi:10.7498/aps.74.20251047

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DENG Rui, HUANG Yufeng, ZHANG Yifan, ZHANG Yingying, SONG Yuanhong. Influence of lower electrode plate grooves on collective behavior of dust particles in radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2025, 74(24): 245202. DOI: 10.7498/aps.74.20251047

Citation:

DENG Rui, HUANG Yufeng, ZHANG Yifan, ZHANG Yingying, SONG Yuanhong. Influence of lower electrode plate grooves on collective behavior of dust particles in radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2025, 74(24): 245202. DOI: 10.7498/aps.74.20251047

Citation:

DENG Rui, HUANG Yufeng, ZHANG Yifan, ZHANG Yingying, SONG Yuanhong. Influence of lower electrode plate grooves on collective behavior of dust particles in radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2025, 74(24): 245202. DOI: 10.7498/aps.74.20251047