Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF<sub>4</sub> plasma source

LI Jingze; ZHAO Mingliang; ZHANG Yuru; GAO Fei; WANG Younian

doi:10.7498/aps.74.20251121

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LI Jingze, ZHAO Mingliang, ZHANG Yuru, GAO Fei, WANG Younian. Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF4 plasma sourceJ. Acta Physica Sinica, 2025, 74(23): 235201. DOI: 10.7498/aps.74.20251121

Citation:

LI Jingze, ZHAO Mingliang, ZHANG Yuru, GAO Fei, WANG Younian. Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF4 plasma sourceJ. Acta Physica Sinica, 2025, 74(23): 235201. DOI: 10.7498/aps.74.20251121

Citation:

LI Jingze, ZHAO Mingliang, ZHANG Yuru, GAO Fei, WANG Younian. Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF4 plasma sourceJ. Acta Physica Sinica, 2025, 74(23): 235201. DOI: 10.7498/aps.74.20251121