Collisional-radiative model for on-line analysis of C4F8/O2/Ar plasma optical emission spectroscopy

ZHANG Zhanling; ZHU Ximing; WANG Lu; ZHAO Yu; YANG Xihong

doi:10.7498/aps.74.20251182

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ZHANG Zhanling, ZHU Ximing, WANG Lu, ZHAO Yu, YANG Xihong. Collisional-radiative model for on-line analysis of C4F8/O2/Ar plasma optical emission spectroscopyJ. Acta Physica Sinica, 2025, 74(23): 235206. DOI: 10.7498/aps.74.20251182

Citation:

ZHANG Zhanling, ZHU Ximing, WANG Lu, ZHAO Yu, YANG Xihong. Collisional-radiative model for on-line analysis of C4F8/O2/Ar plasma optical emission spectroscopyJ. Acta Physica Sinica, 2025, 74(23): 235206. DOI: 10.7498/aps.74.20251182

Citation:

ZHANG Zhanling, ZHU Ximing, WANG Lu, ZHAO Yu, YANG Xihong. Collisional-radiative model for on-line analysis of C4F8/O2/Ar plasma optical emission spectroscopyJ. Acta Physica Sinica, 2025, 74(23): 235206. DOI: 10.7498/aps.74.20251182