Non-equilibrium characteristics analysis of argon inductively coupled plasma

ZHANG Hui; HAN Ning; MENG Xian; CAO Jinwen; SUN Wenjin; LI Mengtian; GENG Jinyue; HUANG Heji

doi:10.7498/aps.74.20251186

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ZHANG Hui, HAN Ning, MENG Xian, CAO Jinwen, SUN Wenjin, LI Mengtian, GENG Jinyue, HUANG Heji. Non-equilibrium characteristics analysis of argon inductively coupled plasmaJ. Acta Physica Sinica, 2025, 74(23): 235215. DOI: 10.7498/aps.74.20251186

Citation:

ZHANG Hui, HAN Ning, MENG Xian, CAO Jinwen, SUN Wenjin, LI Mengtian, GENG Jinyue, HUANG Heji. Non-equilibrium characteristics analysis of argon inductively coupled plasmaJ. Acta Physica Sinica, 2025, 74(23): 235215. DOI: 10.7498/aps.74.20251186

Citation:

ZHANG Hui, HAN Ning, MENG Xian, CAO Jinwen, SUN Wenjin, LI Mengtian, GENG Jinyue, HUANG Heji. Non-equilibrium characteristics analysis of argon inductively coupled plasmaJ. Acta Physica Sinica, 2025, 74(23): 235215. DOI: 10.7498/aps.74.20251186