Synergistic effect of ions and neutrals and surface morphology in plasma deposition/etching precesses

SONG Liuqin; DONG Wan; ZHANG Yifan; SONG Yuanhong

doi:10.7498/aps.74.20251236

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SONG Liuqin, DONG Wan, ZHANG Yifan, SONG Yuanhong. Synergistic effect of ions and neutrals and surface morphology in plasma deposition/etching precessesJ. Acta Physica Sinica, 2025, 74(23): 235208. DOI: 10.7498/aps.74.20251236

Citation:

SONG Liuqin, DONG Wan, ZHANG Yifan, SONG Yuanhong. Synergistic effect of ions and neutrals and surface morphology in plasma deposition/etching precessesJ. Acta Physica Sinica, 2025, 74(23): 235208. DOI: 10.7498/aps.74.20251236

Citation:

SONG Liuqin, DONG Wan, ZHANG Yifan, SONG Yuanhong. Synergistic effect of ions and neutrals and surface morphology in plasma deposition/etching precessesJ. Acta Physica Sinica, 2025, 74(23): 235208. DOI: 10.7498/aps.74.20251236