Two-dimensional fluid simulation of a radio-frequency inductively coupled remote hydrogen plasma source

ZHANG Yu; LUO Qian; HUANG Gaohuang; GAO Fei; WANG Younian

doi:10.7498/aps.75.20251202

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ZHANG Yu, LUO Qian, HUANG Gaohuang, GAO Fei, WANG Younian. Two-dimensional fluid simulation of a radio-frequency inductively coupled remote hydrogen plasma sourceJ. Acta Physica Sinica, 2026, 75(2): 020501. DOI: 10.7498/aps.75.20251202

Citation:

ZHANG Yu, LUO Qian, HUANG Gaohuang, GAO Fei, WANG Younian. Two-dimensional fluid simulation of a radio-frequency inductively coupled remote hydrogen plasma sourceJ. Acta Physica Sinica, 2026, 75(2): 020501. DOI: 10.7498/aps.75.20251202

Citation:

ZHANG Yu, LUO Qian, HUANG Gaohuang, GAO Fei, WANG Younian. Two-dimensional fluid simulation of a radio-frequency inductively coupled remote hydrogen plasma sourceJ. Acta Physica Sinica, 2026, 75(2): 020501. DOI: 10.7498/aps.75.20251202