Basic characteristics of anode double layer in bipolar pulse high-power impulse magnetron sputtering and their effects on ion energy

WU Yiyan; HAN Mingyue; LUO Yang; YANG Mingxuan; LI Liuhe

doi:10.7498/aps.75.20260340

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中国物理学会期刊

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WU Yiyan, HAN Mingyue, LUO Yang, YANG Mingxuan, LI Liuhe. Basic characteristics of anode double layer in bipolar pulse high-power impulse magnetron sputtering and their effects on ion energy. Acta Physica Sinica, 2026, 75(15): 150502. DOI: 10.7498/aps.75.20260340

Citation:

WU Yiyan, HAN Mingyue, LUO Yang, YANG Mingxuan, LI Liuhe. Basic characteristics of anode double layer in bipolar pulse high-power impulse magnetron sputtering and their effects on ion energy. Acta Physica Sinica, 2026, 75(15): 150502. DOI: 10.7498/aps.75.20260340

Citation:

WU Yiyan, HAN Mingyue, LUO Yang, YANG Mingxuan, LI Liuhe. Basic characteristics of anode double layer in bipolar pulse high-power impulse magnetron sputtering and their effects on ion energy. Acta Physica Sinica, 2026, 75(15): 150502. DOI: 10.7498/aps.75.20260340