-
-
1.
西安电子科技大学微电子研究所,西安710071
-
1.
-
[1] Wang Fu, Zhou Yi, Gao Shi-Xin, Duan Zhen-Gang, Sun Zhi-Peng, Wang Jun, Zou Yu, Fu Bao-Qin. Molecular dynamics study of effects of point defects on thermal conductivity in cubic silicon carbide. Acta Physica Sinica, 2022, 71(3): 036501. doi: 10.7498/aps.71.20211434 [2] Zhang Hong, Guo Hong-Xia, Pan Xiao-Yu, Lei Zhi-Feng, Zhang Feng-Qi, Gu Zhao-Qiao, Liu Yi-Tian, Ju An-An, Ouyang Xiao-Ping. Transport process and energy loss of heavy ions in silicon carbide. Acta Physica Sinica, 2021, 70(16): 162401. doi: 10.7498/aps.70.20210503 [3] Lu Yuan-Yuan, Lu Gui-Hua, Zhou Heng-Wei, Huang Yi-Neng. Preparation and properties of spodumene/silicon carbide composite ceramic materials. Acta Physica Sinica, 2020, 69(11): 117701. doi: 10.7498/aps.69.20200232 [4] Li Yuan-Yuan, Yu Yin, Meng Chuan-Min, Zhang Lu, Wang Tao, Li Yong-Qiang, He Hong-Liang, He Duan-Wei. Dynamic impact strength of diamond-SiC superhard composite. Acta Physica Sinica, 2019, 68(15): 158101. doi: 10.7498/aps.68.20190350 [5] Shen Shuai-Shuai, He Chao-Hui, Li Yong-Hong. Non-ionization energy loss of proton in different regions in SiC. Acta Physica Sinica, 2018, 67(18): 182401. doi: 10.7498/aps.67.20181095 [6] Zang Hang, Huang Zhi-Sheng, Li Tao, Guo Rong-Ming. Comparative study of irradiation swelling in monocrystalline and polycrystalline silicon carbide. Acta Physica Sinica, 2017, 66(6): 066104. doi: 10.7498/aps.66.066104 [7] Chen Cheng-Zhao, Zheng Yuan-Yu, Huang Shi-Hao, Li Cheng, Lai Hong-Kai, Chen Song-Yan. Epitaxial growth of thick Ge layers with low dislocation density on silicon substrate by UHV/CVD. Acta Physica Sinica, 2012, 61(7): 078104. doi: 10.7498/aps.61.078104 [8] Song Kun, Chai Chang-Chun, Yang Yin-Tang, Jia Hu-Jun, Chen Bin, Ma Zhen-Yang. Effects of the improved hetero-material-gate approach on sub-micron silicon carbide metal-semiconductor field-effect transistor. Acta Physica Sinica, 2012, 61(17): 177201. doi: 10.7498/aps.61.177201 [9] Fang Chao, Liu Ma-Lin. The study of the Raman spectra of SiC layers in TRISO particles. Acta Physica Sinica, 2012, 61(9): 097802. doi: 10.7498/aps.61.097802 [10] Zhou Nai-Gen, Hong Tao, Zhou Lang. A comparative study between MEAM and Tersoff potentials on the characteristics of melting and solidification of carborundum. Acta Physica Sinica, 2012, 61(2): 028101. doi: 10.7498/aps.61.028101 [11] Su Shao-Jian, Wang Wei, Zhang Guang-Ze, Hu Wei-Xuan, Bai An-Qi, Xue Chun-Lai, Zuo Yu-Hua, Cheng Bu-Wen, Wang Qi-Ming. Epitaxial growth of Ge0.975Sn0.025alloy films on Si(001) substrates by molecular beam epitaxy. Acta Physica Sinica, 2011, 60(2): 028101. doi: 10.7498/aps.60.028101 [12] Li Mei-Ya, Wang Jing, Liu Jun, Yu Ben-Fang, Guo Dong-Yun, Zhao Xing-Zhong. Dependence of growth and property of YBa2Cu3O7-x coated conductors on the thickness of CeO2 buffer layer. Acta Physica Sinica, 2008, 57(5): 3132-3137. doi: 10.7498/aps.57.3132 [13] Yu Li-Hua, Dong Song-Tao, Dong Shi-Run, Xu Jun-Hua. Epitaxial growth and mechanical properties of AlN/Si3N4 nanostructured multilayers. Acta Physica Sinica, 2008, 57(8): 5151-5158. doi: 10.7498/aps.57.5151 [14] Lin Tao, Chen Zhi-Ming, Li Jia, Li Lian-Bi, Li Qing-Min, Pu Hong-Bin. Study of the growth characteristics of SiCGe layers grown on 6H-SiC substrates. Acta Physica Sinica, 2008, 57(9): 6007-6012. doi: 10.7498/aps.57.6007 [15] Kong Ming, Wei Lun, Dong Yun-Shan, Li Ge-Yang. Epitaxial growth and superhardness effect in TiN/Al2O3 nanomultilayers. Acta Physica Sinica, 2006, 55(2): 770-775. doi: 10.7498/aps.55.770 [16] Zhou Nai-Gen, Zhou Lang, Du Dan-Xu. Structure and formation of misfit dislocations in an epitaxial fcc film. Acta Physica Sinica, 2006, 55(1): 372-377. doi: 10.7498/aps.55.372 [17] Yu Wei, He Jie, Sun Yun-Tao, Zhu Hai-Feng, Han Li, Fu Guang-Sheng. Pulse laser crystallization of silicon carbon thin films. Acta Physica Sinica, 2004, 53(6): 1930-1934. doi: 10.7498/aps.53.1930 [18] Tang Xiao-Yan, Zhang Yi-Men, Zhang He-Ming, Zhang Yu-Ming, Dai Xian-Ying, Hu Hui-Yong. 3UCVD deposition SiO2 on SiC wafer and its C-V measurement. Acta Physica Sinica, 2004, 53(9): 3225-3228. doi: 10.7498/aps.53.3225 [19] Lao Ji-Jun, Hu Xiao-Ping, Yu Xiao-Jiang, Li Ge-Yang, Gu Ming-Yuan. Phase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of films. Acta Physica Sinica, 2003, 52(9): 2259-2263. doi: 10.7498/aps.52.2259 [20] Ye Jian-Song, Hu Xiao-Jun. . Acta Physica Sinica, 2002, 51(5): 1108-1112. doi: 10.7498/aps.51.1108
Catalog
Metrics
- Abstract views: 9245
- PDF Downloads: 998
- Cited By: 0
Publishing process
- Received Date:
12 November 2001
- Accepted Date:
17 January 2002
- Published Online:
05 April 2002
下载:
