Microstructural features of DC sputtered vanadium oxide thin films

Pan Meng-Xiao; Cao Xing-Zhong; Li Yang-Xian; Wang Bao-Yi; Xue De-Sheng; Ma Chuang-Xin; Zhou Chun-Lan; Wei Long

doi:10.7498/aps.53.1956

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中国物理学会期刊

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Pan Meng-Xiao, Cao Xing-Zhong, Li Yang-Xian, Wang Bao-Yi, Xue De-Sheng, Ma Chuang-Xin, Zhou Chun-Lan, Wei Long. Microstructural features of DC sputtered vanadium oxide thin films. Acta Physica Sinica, 2004, 53(6): 1956-1960. DOI: 10.7498/aps.53.1956

Citation:

Pan Meng-Xiao, Cao Xing-Zhong, Li Yang-Xian, Wang Bao-Yi, Xue De-Sheng, Ma Chuang-Xin, Zhou Chun-Lan, Wei Long. Microstructural features of DC sputtered vanadium oxide thin films. Acta Physica Sinica, 2004, 53(6): 1956-1960. DOI: 10.7498/aps.53.1956

Citation:

Pan Meng-Xiao, Cao Xing-Zhong, Li Yang-Xian, Wang Bao-Yi, Xue De-Sheng, Ma Chuang-Xin, Zhou Chun-Lan, Wei Long. Microstructural features of DC sputtered vanadium oxide thin films. Acta Physica Sinica, 2004, 53(6): 1956-1960. DOI: 10.7498/aps.53.1956