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Study of 3C-SiC and 4H-SiC films deposited using RF sputtering method

Lin Hong-Feng Xie Er-Qing Ma Zi-Wei Zhang Jun Peng Ai-Hua He De-Yan

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Study of 3C-SiC and 4H-SiC films deposited using RF sputtering method

Lin Hong-Feng, Xie Er-Qing, Ma Zi-Wei, Zhang Jun, Peng Ai-Hua, He De-Yan
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  • Abstract views:  8252
  • PDF Downloads:  1049
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Publishing process
  • Received Date:  18 July 2003
  • Accepted Date:  13 April 2004
  • Published Online:  05 April 2004

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