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2015, 64(1): 018102.
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2015, 64(10): 107701.
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2006, 55(11): 5764-5768.
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Ye Chao, Ning Zhao-Yuan, Xin Yu, Wang Ting-Ting, Yu Xiao-Zhu. Influence of Si—OH groups on properties and avoidance for SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma. Acta Physica Sinica,
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2005, 54(10): 4914-4919.
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2003, 52(12): 3130-3134.
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