Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Characterization and bonding configuration of SiCOH low-k films

Wang Ting-Ting Ye Chao Ning Zhao-Yuan Cheng Shan-Hua

Citation:

Characterization and bonding configuration of SiCOH low-k films

Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  12393
  • PDF Downloads:  1043
  • Cited By: 0
Publishing process
  • Received Date:  09 May 2004
  • Accepted Date:  02 June 2004
  • Published Online:  05 January 2005

/

返回文章
返回