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Effect of SiO2 crystallization on AlN/SiO2 nano-multilayers with superhardness effect

Zhao Wen-Ji Kong Ming Huang Bi-Long Li Ge-Yang

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Effect of SiO2 crystallization on AlN/SiO2 nano-multilayers with superhardness effect

Zhao Wen-Ji, Kong Ming, Huang Bi-Long, Li Ge-Yang
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  • Abstract views:  8337
  • PDF Downloads:  1277
  • Cited By: 0
Publishing process
  • Received Date:  21 July 2006
  • Accepted Date:  10 August 2006
  • Published Online:  11 July 2007

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