| [1] |
HUANG Tianyuan, ZHAO Yifan, MO Chaochao, MEI Yang, ZHANG Xiaoman, JI Peiyu, WU Xuemei. Ion Energy Distribution Modulation in RF Magnetron Sputtering of ITO via Auxiliary Anode Bias. Acta Physica Sinica,
2025, 74(23): .
doi: 10.7498/aps.74.20251172
|
| [2] |
XU Yihong, FAN Weihang, WANG Chen. Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga2O3 films and its solar-blind photodetector. Acta Physica Sinica,
2025, 74(2): 028104.
doi: 10.7498/aps.74.20240972
|
| [3] |
Luo Chang-Wei, Qiu Meng-Lin, Wang Guang-Fu, Wang Ting-Shun, Zhao Guo-Qiang, Hua Qing-Song. Ions beam induced luminescence study of variation of defects in zinc oxide during ion implant and after annealing. Acta Physica Sinica,
2020, 69(10): 102901.
doi: 10.7498/aps.69.20200029
|
| [4] |
Yang Tian-Yong, Kong Chun-Yang, Ruan Hai-Bo, Qin Guo-Ping, Li Wan-Jun, Liang Wei-Wei, Meng Xiang-Dan, Zhao Yong-Hong, Fang Liang, Cui Yu-Ting. Study on the p-type conductivities and Raman scattering properties of N+ ion-implanted O-rich ZnO thin films. Acta Physica Sinica,
2013, 62(3): 037703.
doi: 10.7498/aps.62.037703
|
| [5] |
Yang Tian-Yong, Kong Chun-Yang, Ruan Hai-Bo, Qin Guo-Ping, Li Wan-Jun, Liang Wei-Wei, Meng Xiang-Dan, Zhao Yong-Hong, Fang Liang, Cui Yu-Ting. Effects of the annealing temperature on microstructure and room-temperature ferromagnetism of N+ ion-implanted ZnO: Mn thin film. Acta Physica Sinica,
2012, 61(16): 168101.
doi: 10.7498/aps.61.168101
|
| [6] |
Qin Xi-Feng, Liang Yi, Wang Feng-Xiang, Li Shuang, Fu Gang, Ji Yan-Ju. Range and annealing behavior of Er ions implanted in SiC. Acta Physica Sinica,
2011, 60(6): 066101.
doi: 10.7498/aps.60.066101
|
| [7] |
Zang Hang, Wang Zhi-Guang, Pang Li-Long, Wei Kong-Fang, Yao Cun-Feng, Shen Tie-Long, Sun Jian-Rong, Ma Yi-Zhun, Gou Jie, Sheng Yan-Bin, Zhu Ya-Bin. Raman investigation of ion-implanted ZnO films. Acta Physica Sinica,
2010, 59(7): 4831-4836.
doi: 10.7498/aps.59.4831
|
| [8] |
Liu Xian-Ming, Li Bin-Cheng, Gao Wei-Dong, Han Yan-Ling. Infrared spectroscopic ellipsometry studies of ion-implanted and annealed silicon wafers. Acta Physica Sinica,
2010, 59(3): 1632-1637.
doi: 10.7498/aps.59.1632
|
| [9] |
Xie Jing, Li Bing, Li Yuan-Jie, Yan Pu, Feng Liang-Huan, Cai Ya-Ping, Zheng Jia-Gui, Zhang Jing-Quan, Li Wei, Wu Li-Li, Lei Zhi, Zeng Guang-Gen. Study of ZnS thin films prepared by RF magnetron sputtering technique. Acta Physica Sinica,
2010, 59(8): 5749-5754.
doi: 10.7498/aps.59.5749
|
| [10] |
Su Hai-Qiao, Xue Shu-Wen, Chen Meng, Li Zhi-Jie, Yuan Zhao-Lin, Fu Yu-Jun, Zu Xiao-Tao. Effects of Ti ion implantation and post-thermal annealing on the structural and optical properties of ZnS films. Acta Physica Sinica,
2009, 58(10): 7108-7113.
doi: 10.7498/aps.58.7108
|
| [11] |
Li Yang-Ping, Liu Zheng-Tang. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film. Acta Physica Sinica,
2009, 58(7): 5022-5028.
doi: 10.7498/aps.58.5022
|
| [12] |
Yang Yi-Tao, Zhang Chong-Hong, Zhou Li-Hong, Li Bing-Sheng. A study of damage evolution during annealing of helium-implanted magnesium-aluminate spinel. Acta Physica Sinica,
2008, 57(8): 5165-5169.
doi: 10.7498/aps.57.5165
|
| [13] |
Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica,
2008, 57(10): 6587-6592.
doi: 10.7498/aps.57.6587
|
| [14] |
Zhou Li-Hong, Zhang Chong-Hong, Li Bing-Sheng, Yang Yi-Tao, Song Yin. Photoluminescence of Ar+ implanted sapphire before and after annealing. Acta Physica Sinica,
2008, 57(4): 2562-2566.
doi: 10.7498/aps.57.2562
|
| [15] |
Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng. RF magnetron sputtering of GaP thin film and computer simulation of its depositing process. Acta Physica Sinica,
2007, 56(5): 2937-2944.
doi: 10.7498/aps.56.2937
|
| [16] |
Zhang Xi-Jian, Ma Hong-Lei, Wang Qing-Pu, Ma Jin, Zong Fu-Jian, Xiao Hong-Di, Ji Feng. Effect of annealing on optical properties of MgxZn1－xO thin films deposited at low temperature. Acta Physica Sinica,
2006, 55(1): 437-440.
doi: 10.7498/aps.55.437
|
| [17] |
Zhang Xi-Jian, Ma Hong-Lei, Wang Qing-Pu, Ma Jin, Zong Fu-Jian, Xiao Hong-Di, Ji Feng. Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering. Acta Physica Sinica,
2005, 54(9): 4309-4312.
doi: 10.7498/aps.54.4309
|
| [18] |
Wang Yu-Heng, Ma Jin, Ji Feng, Yu Xu-Hu, Zhang Xi-Jian, Ma Hong-Lei. Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering. Acta Physica Sinica,
2005, 54(4): 1731-1735.
doi: 10.7498/aps.54.1731
|
| [19] |
Zhang Li, Jiang Chang-Zhong, Ren Feng, Chen Hai-Bo, Shi Ying, Fu Qiang. Optical absorption of nanoclusters by sequentially implanting into SiO2 glass and subsequently annealing in a selected atmosphere. Acta Physica Sinica,
2004, 53(9): 2910-2914.
doi: 10.7498/aps.53.2910
|
| [20] |
Zhang De-Heng, Wang Qing-Pu, Xue Zhong-Ying. Ultra violet photoluminescenc of ZnO films on different substrates. Acta Physica Sinica,
2003, 52(6): 1484-1487.
doi: 10.7498/aps.52.1484
|
下载:
