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Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering

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Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering

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  • Abstract views:  7783
  • PDF Downloads:  995
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Publishing process
  • Received Date:  02 December 2006
  • Accepted Date:  15 May 2007
  • Published Online:  05 June 2007

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