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XU Yihong, FAN Weihang, WANG Chen. Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga2O3 films and its solar-blind photodetector. Acta Physica Sinica,
2025, 74(2): 028104.
doi: 10.7498/aps.74.20240972
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HUANG Tianyuan, ZHAO Yifan, MO Chaochao, MEI Yang, ZHANG Xiaoman, JI Peiyu, WU Xuemei. Ion Energy Distribution Modulation in RF Magnetron Sputtering of ITO via Auxiliary Anode Bias. Acta Physica Sinica,
2025, 74(23): .
doi: 10.7498/aps.74.20251172
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Luo Ju-Xin, Gao Hong-Li, Deng Jin-Xiang, Ren Jia-Hui, Zhang Qing, Li Rui-Dong, Meng Xue. Effects of annealing temperature on properties of gallium oxide thin films and ultraviolet detectors. Acta Physica Sinica,
2023, 72(2): 028502.
doi: 10.7498/aps.72.20221716
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Cheng Jing-Yun, Kang Chao-Yang, Zong Hai-Tao, Cao Guo-Hua, Li Ming. Structural and photoelectrical properties of AZO thin films improved by Ag buffer layers. Acta Physica Sinica,
2017, 66(2): 027702.
doi: 10.7498/aps.66.027702
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Wu Cheng-Guo, Wu Wen-Yuan, Gong Yan-Chun, Dai Bin-Fei, He Su-Hong, Huang Yan-Hua. First-principles study on the band-gap changes of Zn2GeO4 under high pressure. Acta Physica Sinica,
2015, 64(11): 114213.
doi: 10.7498/aps.64.114213
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Zhang Wen-Zhao, Tang Xing-Hua, Li Jia-Qing, Shi Li-Qun. Deuterium retention in carbon-tungsten co-deposition layers prepared by RF magnetron sputtering. Acta Physica Sinica,
2013, 62(19): 195202.
doi: 10.7498/aps.62.195202
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Guo Hong-Li, Yang Huan-Yin, Tang Huan-Fang, Hou Hai-Jun, Zheng Yong-Lin, Zhu Jian-Guo. Effects of high pressure annealing technique on the structure, morphology and electric properties of 0.65PMN-0.35PT thin films. Acta Physica Sinica,
2013, 62(13): 130704.
doi: 10.7498/aps.62.130704
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Xu Hui, Wang Shun-Li, Liu Ai-Ping, Chen Ben-Yong, Tang Wei-Hua. Electronic state and its effect on the hydrophilicity of Cu/TiOx composite films. Acta Physica Sinica,
2010, 59(5): 3601-3606.
doi: 10.7498/aps.59.3601
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Gao Li, Zhang Jian-Min. Photoluminescence of diluted Mg doped ZnO thin films and band-gap change mechanisms. Acta Physica Sinica,
2010, 59(2): 1263-1267.
doi: 10.7498/aps.59.1263
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Xie Jing, Li Bing, Li Yuan-Jie, Yan Pu, Feng Liang-Huan, Cai Ya-Ping, Zheng Jia-Gui, Zhang Jing-Quan, Li Wei, Wu Li-Li, Lei Zhi, Zeng Guang-Gen. Study of ZnS thin films prepared by RF magnetron sputtering technique. Acta Physica Sinica,
2010, 59(8): 5749-5754.
doi: 10.7498/aps.59.5749
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Gao Li, Zhang Jian-Min. Preparation of Mg and Al co-doped ZnO thin films with tunable band gap. Acta Physica Sinica,
2009, 58(10): 7199-7203.
doi: 10.7498/aps.58.7199
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Li Yang-Ping, Liu Zheng-Tang. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film. Acta Physica Sinica,
2009, 58(7): 5022-5028.
doi: 10.7498/aps.58.5022
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Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica,
2008, 57(10): 6587-6592.
doi: 10.7498/aps.57.6587
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Wang Nan, Kong Chun-Yang, Zhu Ren-Jiang, Qin Guo-Ping, Dai Te-Li, Nan Mao, Ruan Hai-Bo. Preparation and characteristics research of p-type ZnO films. Acta Physica Sinica,
2007, 56(10): 5974-5978.
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Feng Xian-Jin, Ma Jin, Ge Song-Hua, Ji Feng, Wang Yong-Li, Yang Fan, Ma Hong-Lei. Structural and photoluminescence properties for SnO2:Sb films prepared on Al2O3 substrate. Acta Physica Sinica,
2007, 56(8): 4872-4876.
doi: 10.7498/aps.56.4872
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Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng. RF magnetron sputtering of GaP thin film and computer simulation of its depositing process. Acta Physica Sinica,
2007, 56(5): 2937-2944.
doi: 10.7498/aps.56.2937
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Zhang Xi-Jian, Ma Hong-Lei, Wang Qing-Pu, Ma Jin, Zong Fu-Jian, Xiao Hong-Di, Ji Feng. Effect of annealing on optical properties of MgxZn1-xO thin films deposited at low temperature. Acta Physica Sinica,
2006, 55(1): 437-440.
doi: 10.7498/aps.55.437
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Zhang Xi-Jian, Ma Hong-Lei, Wang Qing-Pu, Ma Jin, Zong Fu-Jian, Xiao Hong-Di, Ji Feng. Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering. Acta Physica Sinica,
2005, 54(9): 4309-4312.
doi: 10.7498/aps.54.4309
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Wang Yu-Heng, Ma Jin, Ji Feng, Yu Xu-Hu, Zhang Xi-Jian, Ma Hong-Lei. Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering. Acta Physica Sinica,
2005, 54(4): 1731-1735.
doi: 10.7498/aps.54.1731
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Zhang De-Heng, Wang Qing-Pu, Xue Zhong-Ying. Ultra violet photoluminescenc of ZnO films on different substrates. Acta Physica Sinica,
2003, 52(6): 1484-1487.
doi: 10.7498/aps.52.1484
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