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Ma Hai-Lin, Su Qing. Effect of oxygen pressure on structure and optical band gap of gallium oxide thin films prepared by sputtering. Acta Physica Sinica,
2014, 63(11): 116701.
doi: 10.7498/aps.63.116701
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Yang Duo, Zhong Ning, Shang Hai-Long, Sun Shi-Yang, Li Ge-Yang. Microstructures and mechanical properties of (Ti, N)/Al nanocomposite films by magnetron sputtering. Acta Physica Sinica,
2013, 62(3): 036801.
doi: 10.7498/aps.62.036801
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Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun. Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica,
2012, 61(16): 165101.
doi: 10.7498/aps.61.165101
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Wang You-Fa, Wu Zhou-Li, Li Wen-Run, Wang Shuai, Tong Hong-Shuang, Ruan Yong-Feng. Spectroscopic properties of cerium doped YVO4 crystals and analysis on valence state of cerium ion. Acta Physica Sinica,
2012, 61(22): 228105.
doi: 10.7498/aps.61.228105
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Ju Dong-Ying, Ding Wan-Yu, Chai Wei-Ping, Wang Hua-Lin. Composition and crystal structure of N doped TiO2 film deposited with different O2 flow rates. Acta Physica Sinica,
2011, 60(2): 028105.
doi: 10.7498/aps.60.028105
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Zhang Yu, Wen Bin, Song Xiao-Yang, Li Ting-Ju. Synthesis and bonding properties of carbon nanotubes with different nitrogen contents. Acta Physica Sinica,
2010, 59(5): 3583-3588.
doi: 10.7498/aps.59.3583
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Ding Wan-Yu, Wang Hua-Lin, Miao Zhuang, Zhang Jun-Ji, Chai Wei-Ping. Influence of deposition parameter on chemical structure and moisture resistant properties for SiNx films deposited by DC pulse magnetron sputtering. Acta Physica Sinica,
2009, 58(1): 432-437.
doi: 10.7498/aps.58.432
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Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica,
2008, 57(3): 1796-1801.
doi: 10.7498/aps.57.1796
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Ma Ge-Lin, Zhang Yu-Ming, Zhang Yi-Men, Ma Zhong-Fa. Study on the chemical states of the surface of SiC epilayer. Acta Physica Sinica,
2008, 57(7): 4119-4124.
doi: 10.7498/aps.57.4119
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Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica,
2008, 57(10): 6587-6592.
doi: 10.7498/aps.57.6587
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Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. Influences of substrate temperature on crystalline characteristics and mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering. Acta Physica Sinica,
2008, 57(8): 5170-5175.
doi: 10.7498/aps.57.5170
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Xin Ping, Sun Cheng-Wei, Qin Fu-Wen, Wen Sheng-Ping, Zhang Qing-Yu. Room-temperature photoluminescence of ZnO/MgO multiple quantum wells deposited by reactive magnetron sputtering. Acta Physica Sinica,
2007, 56(2): 1082-1087.
doi: 10.7498/aps.56.1082
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. The effect of temperature of substrate and oxygen partial pressure on V2O5 films fabricated by magnetron sputtering. Acta Physica Sinica,
2007, 56(12): 7255-7261.
doi: 10.7498/aps.56.7255
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Xiao Jian-Rong, Xu Hui, Guo Ai-Min, Wang Huan-You. Study of FN-DLC thin films: (Ⅰ) sp structure and chemical bond analysis. Acta Physica Sinica,
2007, 56(3): 1802-1808.
doi: 10.7498/aps.56.1802
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. Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering. Acta Physica Sinica,
2007, 56(12): 7188-7194.
doi: 10.7498/aps.56.7188
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Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering. Acta Physica Sinica,
2006, 55(4): 1965-1973.
doi: 10.7498/aps.55.1965
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Ding Wan-Yu, Xu Jun, Li Yan-Qin, Piao Yong, Gao Peng, Deng Xin-Lü, Dong Chuang. Characterization of silicon nitride films prepared by MW-ECR magnetron sputtering. Acta Physica Sinica,
2006, 55(3): 1363-1368.
doi: 10.7498/aps.55.1363
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Zhou Xiao-Li, Du Pi-Yi. CaCu33Ti44O1212 films prepared by magnetron s puttering. Acta Physica Sinica,
2005, 54(4): 1809-1813.
doi: 10.7498/aps.54.1809
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Mu Zong-Xin, Li Guo-Qing, Qin Fu-Wen, Huang Kai-Yu, Che De-Liang. The model of the magnetic mirror effect in the unbalanced magnetron sputtering ion beams. Acta Physica Sinica,
2005, 54(3): 1378-1384.
doi: 10.7498/aps.54.1378
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Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua. Characterization and bonding configuration of SiCOH low-k films. Acta Physica Sinica,
2005, 54(2): 892-896.
doi: 10.7498/aps.54.892
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