Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Influence of deposition parameter on chemical structure and moisture resistant properties for SiNx films deposited by DC pulse magnetron sputtering

Ding Wan-Yu Wang Hua-Lin Miao Zhuang Zhang Jun-Ji Chai Wei-Ping

Citation:

Influence of deposition parameter on chemical structure and moisture resistant properties for SiNx films deposited by DC pulse magnetron sputtering

Ding Wan-Yu, Wang Hua-Lin, Miao Zhuang, Zhang Jun-Ji, Chai Wei-Ping
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  8043
  • PDF Downloads:  1745
  • Cited By: 0
Publishing process
  • Received Date:  17 June 2008
  • Accepted Date:  04 August 2008
  • Published Online:  20 January 2009

/

返回文章
返回