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The compound X-ray refractive lens is a kind of optical components for X-rays focusing and imaging. This paper reports the authors’ research on focusing performance of the compound X-ray refractive lens with fabrication errors. Firstly SEM measurements of the semi-cylindrical PMMA compound X-ray refractive lens fabricated by means of deep X-ray lithography are performed, and accordingly the fabrication errors are measured. Then the theoretical analysis and simulations are done for the focusing performance of the compound X-ray refractive lens with the fabrication errors. Finally, X-ray microbeam experimental system is built on the 4W1A beamline of Beijing Synchrotron Radiation Facility (BSRF) for measuring the focusing performance of the semi-cylindrical PMMA X-ray refractive lenses we fabricated. And the focusing performances of the semi-cylindrical PMMA compound X-ray refractive lenses with and without distinct fabrication errors are measured and analyzed under 8 keV monochromatic X-rays.
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Keywords:
- compound X-ray refractive lens /
- fabrication error /
- X-ray focusing /
- synchrontron radiation
[1] Snigirev A, Kohn V, Snigireva I, Lengeler B 1996 Nature 384 49
[2] Aoki S, Ogata T, Sudo S, Onuki T 1992 Jpn.J. Appl. Phys. 31 3477
[3] Beaz A 1961 J. Opt. Soc. Am. 51 405
[4] Huang W, Li Y, Gu Y, Zhang J, You Y, ChunYu S, He Y, Lei A, Chen Z, Ma Y, Jin C 2003 Acta Phys. Sin. 52 809 (in Chinese)[黄文忠、李英骏、谷渝秋、张 杰、尤永禄、淳于书泰、何颍玲、雷安乐、陈正林、马月英、金春水 2003 物理学报 52 809]
[5] Le Z, Pan S 1999 Opt. Commun. 159 285
[6] Kumakhov M, Komarov F 1990 Phys. Rep. 191 289
[7] Chen B 2000 Acta Phys. Sin. 49 1933 (in Chinese)[陈宝振 2000 物理学报 49 1933]
[8] Schroer C, Benner B, Gunzler T, Kuhlmann M, Zimprich C, Lengeler B, Rau C, Weitkamp T, Snigirev A, Snigireva I, Applenzller J 2002 Rev. Sci. Instrum. 73 1640
[9] Schroer C 2001 Appl. Phys. Lett. 79 1912
[10] Beguiristain H, Anderson I, Dewhurst C, Piestrup M, Cremer J, Pantell R 2002 Appl. Phys. Lett. 81 4290
[11] Bohic S, Simionovici A, Snigirev A, Ortega R, Devès G, Heymann D, Schroer C 2001 Appl. Phys. Lett. 78 3544
[12] Drakopoulos N, Zegenhagen J, Snigrev A, Snigireva I, Hauser M, Eberl K, Aristov V, Shabelnikov L, Yunkin V 2002 Appl. Phys. Lett. 81 2279
[13] Zhu Y, Liang J, Liang Z, Huang X, Le Z, Yi F, Hou F, Huang W, Dong W, Wang W, Wang Z, Cui N 2009 Acta Phys. Sin. 58 1526 (in Chinese)[朱燕青、梁静秋、梁中翥、黄鑫华、乐孜纯、伊福廷、侯凤杰、黄万霞、董 文、王维彪、王志立、崔乃迪 2009 物理学报 58 1526]
[14] Le Z and Liang J 2003 J. Opt. A: Pure & Appl. Opt. 5 374
[15] Le Z, Liang J, Dong W, Zhu P, Peng L, Wang W, Huang W, Yuan Q, Wang J 2007 Chin. Phys. 16 984
[16] Liang J, Le Z 2005 Optics and Precision Engineering 13 60 (in Chinese)[梁静秋、乐孜纯2005 光学精密工程 13 60]
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[1] Snigirev A, Kohn V, Snigireva I, Lengeler B 1996 Nature 384 49
[2] Aoki S, Ogata T, Sudo S, Onuki T 1992 Jpn.J. Appl. Phys. 31 3477
[3] Beaz A 1961 J. Opt. Soc. Am. 51 405
[4] Huang W, Li Y, Gu Y, Zhang J, You Y, ChunYu S, He Y, Lei A, Chen Z, Ma Y, Jin C 2003 Acta Phys. Sin. 52 809 (in Chinese)[黄文忠、李英骏、谷渝秋、张 杰、尤永禄、淳于书泰、何颍玲、雷安乐、陈正林、马月英、金春水 2003 物理学报 52 809]
[5] Le Z, Pan S 1999 Opt. Commun. 159 285
[6] Kumakhov M, Komarov F 1990 Phys. Rep. 191 289
[7] Chen B 2000 Acta Phys. Sin. 49 1933 (in Chinese)[陈宝振 2000 物理学报 49 1933]
[8] Schroer C, Benner B, Gunzler T, Kuhlmann M, Zimprich C, Lengeler B, Rau C, Weitkamp T, Snigirev A, Snigireva I, Applenzller J 2002 Rev. Sci. Instrum. 73 1640
[9] Schroer C 2001 Appl. Phys. Lett. 79 1912
[10] Beguiristain H, Anderson I, Dewhurst C, Piestrup M, Cremer J, Pantell R 2002 Appl. Phys. Lett. 81 4290
[11] Bohic S, Simionovici A, Snigirev A, Ortega R, Devès G, Heymann D, Schroer C 2001 Appl. Phys. Lett. 78 3544
[12] Drakopoulos N, Zegenhagen J, Snigrev A, Snigireva I, Hauser M, Eberl K, Aristov V, Shabelnikov L, Yunkin V 2002 Appl. Phys. Lett. 81 2279
[13] Zhu Y, Liang J, Liang Z, Huang X, Le Z, Yi F, Hou F, Huang W, Dong W, Wang W, Wang Z, Cui N 2009 Acta Phys. Sin. 58 1526 (in Chinese)[朱燕青、梁静秋、梁中翥、黄鑫华、乐孜纯、伊福廷、侯凤杰、黄万霞、董 文、王维彪、王志立、崔乃迪 2009 物理学报 58 1526]
[14] Le Z and Liang J 2003 J. Opt. A: Pure & Appl. Opt. 5 374
[15] Le Z, Liang J, Dong W, Zhu P, Peng L, Wang W, Huang W, Yuan Q, Wang J 2007 Chin. Phys. 16 984
[16] Liang J, Le Z 2005 Optics and Precision Engineering 13 60 (in Chinese)[梁静秋、乐孜纯2005 光学精密工程 13 60]
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