Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure

Guo Qing-Chao; Zhang Jia-Liang; Liu Li-Ying; Wang De-Zhen

doi:10.7498/aps.60.025207

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Guo Qing-Chao, Zhang Jia-Liang, Liu Li-Ying, Wang De-Zhen. Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure. Acta Physica Sinica, 2011, 60(2): 025207. DOI: 10.7498/aps.60.025207

Citation:

Guo Qing-Chao, Zhang Jia-Liang, Liu Li-Ying, Wang De-Zhen. Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure. Acta Physica Sinica, 2011, 60(2): 025207. DOI: 10.7498/aps.60.025207

Citation:

Guo Qing-Chao, Zhang Jia-Liang, Liu Li-Ying, Wang De-Zhen. Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure. Acta Physica Sinica, 2011, 60(2): 025207. DOI: 10.7498/aps.60.025207