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The mode transition and coexistence were investigated in atmospheric pressure argon radio frequency capacitive discharge. By use of a program compiled by the authors for the nitrogen's second positive band simulation, comparison between the experimental and simulated spectra of band (0, 1) and (1, 2) was used to determine the rotational and vibrational temperatures of N2. The trends of vibrational and rotational temperatures with discharge power were studied to observe the temperature jump corresponding to the discharge mode transition. Utilizing a well-known software named Lifbase, the simulated spectra of OH (A—X)(0, 0) was calculated to obtain the rotational temperature of OH by comparing with the experimental OH (A—X)(0, 0) band. The calculated rotational temperature of OH is well consistent with the result of nitrogen's second positive band, which shows that the neutral species are at thermal equilibrium in the space of discharge. According to the current-voltage characteristic, the temperature jump corresponding to the discharge mode transition was confirmed in accordance with the photograph of discharge.
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Keywords:
- atmospheric pressure plasma /
- discharge mode /
- rotational temperature
[1] Sergei E A, Michael L H 2005 Chemical Vapor Deposition 11 457
[2] Chinese) [陈 波、 郑志坚、 丁永坤 2001 物理学报 50 711]
[3] Nowling G R, Babayan S E, Jankovic V, Hicks R F 2002 Plasma Sources Science and Technology 11 97
[4] Li Y P, Liu Z T 2009 Acta Phys. Sin. 58 5022 (in Chinese) [李阳平、 刘正堂 2009 物理学报 58 5022]
[5] Sarra-Bournet C, Turgeon S, Mantovani D, Laroche G 2006 Plasma Processes and Polymers 3 506
[6] Ladwig A, Babayan S, Smith M, Hester M, Highland W, Koch R, Hicks R 2007 Surface and Coatings Technology 201 6460
[7] Leveille V, Coulombe S 2006 Measurement Science and Technology 17 3027
[8] Shang W L, Wang D Z, Kong M G 2007 Chin. Phys. 16 485
[9] Shi J J, Kong M G 2005 J. Appl. Phys. 97 023306
[10] Moon S Y, Rhee J K, Kim D B, Gweon B M, Choe W 2009 Current Appl. Phys. 9 274
[11] Chen B, Zheng Z J, Ding Y K 2001 Acta Phys. Sin. 50 711 (in
[12] Huber K P, Herzberg G 1979 Molecular Spectra and Molecular Structure (New York: Van Nostrand Reinhold) p95
[13] Shi J J, Kong M G 2007 Appl. Phys. Lett. 90 111502
[14] Zhu W C, Wang B R, Yao Z X, Pu Y K 2005 J. Phys. D: Appl. Phys. 38 1396
[15] Park J, Henins I, Herrmann H W, Selwyn G S, Hicks R F 2001 J. Appl. Phys. 89 20
[16] Piper L G 1993 J. Chem. Phys. 99 3174
[17] Hao Z Q, Zhang J, Yu J, Zhang Z, Zhong J Y, Zang C Z, Jin Z, Wang Z H, Wei Z Y 2006 Acta Phys. Sin. 55 299 (in Chinese) [郝作强、 张 杰、 俞 进、 张 喆、 仲佳勇、 臧充之、 金 展、 王兆华、 魏志义 2006 物理学报 55 299]
[18] Luque J, Crosley D R 1999 LIFBASE: Database and Spectral Simulation Program (Version 2.0.53) SRI International Report MP99-009
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[1] Sergei E A, Michael L H 2005 Chemical Vapor Deposition 11 457
[2] Chinese) [陈 波、 郑志坚、 丁永坤 2001 物理学报 50 711]
[3] Nowling G R, Babayan S E, Jankovic V, Hicks R F 2002 Plasma Sources Science and Technology 11 97
[4] Li Y P, Liu Z T 2009 Acta Phys. Sin. 58 5022 (in Chinese) [李阳平、 刘正堂 2009 物理学报 58 5022]
[5] Sarra-Bournet C, Turgeon S, Mantovani D, Laroche G 2006 Plasma Processes and Polymers 3 506
[6] Ladwig A, Babayan S, Smith M, Hester M, Highland W, Koch R, Hicks R 2007 Surface and Coatings Technology 201 6460
[7] Leveille V, Coulombe S 2006 Measurement Science and Technology 17 3027
[8] Shang W L, Wang D Z, Kong M G 2007 Chin. Phys. 16 485
[9] Shi J J, Kong M G 2005 J. Appl. Phys. 97 023306
[10] Moon S Y, Rhee J K, Kim D B, Gweon B M, Choe W 2009 Current Appl. Phys. 9 274
[11] Chen B, Zheng Z J, Ding Y K 2001 Acta Phys. Sin. 50 711 (in
[12] Huber K P, Herzberg G 1979 Molecular Spectra and Molecular Structure (New York: Van Nostrand Reinhold) p95
[13] Shi J J, Kong M G 2007 Appl. Phys. Lett. 90 111502
[14] Zhu W C, Wang B R, Yao Z X, Pu Y K 2005 J. Phys. D: Appl. Phys. 38 1396
[15] Park J, Henins I, Herrmann H W, Selwyn G S, Hicks R F 2001 J. Appl. Phys. 89 20
[16] Piper L G 1993 J. Chem. Phys. 99 3174
[17] Hao Z Q, Zhang J, Yu J, Zhang Z, Zhong J Y, Zang C Z, Jin Z, Wang Z H, Wei Z Y 2006 Acta Phys. Sin. 55 299 (in Chinese) [郝作强、 张 杰、 俞 进、 张 喆、 仲佳勇、 臧充之、 金 展、 王兆华、 魏志义 2006 物理学报 55 299]
[18] Luque J, Crosley D R 1999 LIFBASE: Database and Spectral Simulation Program (Version 2.0.53) SRI International Report MP99-009
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