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The AlTiN composition multilayer coatings with a periodic change in nitrogen content are deposited on high speed steel (W18Cr4V) substrates with a medium-frequency reactive magnetron sputtering system and TiAl targets and by alternately changing nitrogen flux during deposition. These of coatings are annealed separately at temperatures of 600, 700 and 800 ℃ in vacuum for 5 hours. Their microstructures are studied by x-ray diffraction, field emission scanning electron microscopy, and high-resolution transmission electron microscopy, while their mechanical behaviors and adhesion properties are investigated using nano-indenter, scratch test, and friction and wear instrument. The results show that the AlTiN composition multilayer coatings obtained by alternately changing nitrogen flux during deposition possess stable and good mechanical properties. After 800 ℃ vacuum annealing, the interface of AlTiN multilayer coating is still very clear. Annealing increases crystallization degree and grain size of AlTiN multilayer coating, but the crystallization degree of high nitrogen content layer is still higher than that of low nitrogen content layer. After vacuum annealing, the hardness of AlTiN multilayer coating reduceds. The hardness of AlTiN multilayer coating after 800 ℃ annealing is larger than after 600 ℃ annealing, but as the annealing temperature increases, wear resistance and anti-spalling performance of AlTiN multilayer coatings decrease dramatically.
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Keywords:
- AlTiN multilayer coatings /
- annealing /
- microstructure /
- mechanical property
[1] Peter P, Boris N, Miha C, Anton Z 1999 Vacuum 53 127
[2] Lee S Y, Wang S C, Chen J S, Huang J L 2007 Surf. Coat. Technol. 202 977
[3] Barshiliaa H C, Prakasha M S, Jainb A, Rajam K S 2005 Vacuum 77 169
[4] Jeong J J, Hwang S K, Lee C M 2002 Surf. Coat. Technol. 151—152 82
[5] Ohnuma H, Nihira N, Mistuo A, Toyoda K, Kubota K, Aizawa T 2004 Surf. Coat. Technol. 177—178 623
[6] Kim G S, Lee S Y, Hahn J H. 2005 Surf. Coat. Technol. 193 213
[7] Fox-Rabinovich G S, Weatherly G C, Dodonov A I, Kovalev A I, Shuster L S, Veldhuis S C, Dosbaeva G K, Wainstein D L, Migranov M S 2004 Surf. Coat. Technol. 177—178 800
[8] Mo J L, Zhu M H, Lei B, Leng Y X, Huang N 2007 Wear 263 1423
[9] Luo Q H, Yang H S, Lu Y H, Lou Y Z, Yu D L, Wang Y B 2010 J. Aeronaut. Mater. 30 46 (in Chinese) [罗庆洪、杨会生、陆永浩、娄艳芝、于栋利、王燕斌. 2010 航空材料学报 30 46]
[10] Chen J T, Wang J, Zhang F, Zhang G A, Fan X Y, Wu Z G, Yan P X 2008 J. Alloys Comp. 124 245
[11] Fang Z B, Gong H X, Liu X Q, Xu D Y, Huang C M, Wang Y Y 2003 Acta Phys. Sin. 52 1749 (in Chinese) [方泽波、龚恒翔、刘雪芹、徐大印、黄春明、王印月 2003 物理学报 52 1749]
[12] Feng W R, Yan D R, He J N, Chen G L, Gu W C, Zhang G L, Liu C Z, Yang S Z 2005 Acta Phys. Sin. 54 2400 (in Chinese)[冯文然、阎殿然、何继宁、陈光良、顾伟超、张谷令、刘赤子、杨思泽 2005 物理学报 54 2400]
[13] Li H K, Lin G Q, Dong C 2010 Acta Phys. Sin. 59 4301 (in Chinese) [李红凯、林国强、董 闯 2010 物理学报 59 4301]
[14] Mo J L 2008 Ph.D. Dissertation (Chengdn: Southwest Jiaotong University) (in Chinese) [莫继良 2008 博士学位论文(成都:西南交通大学)]
[15] Zhang D Y, Deng M, Peng W Y, Xu L P, Yang C Y 1997 Trans. Metal Heat Treat. 18 40 (in Chinese) [张德元、邓 鸣、彭文屹、许兰萍、杨春燕 1997 金属热处理学报 18 40]
[16] Liu Y F, Zhang G L, Wang J L, Liu C Z, Yang S Z 2004 Acta Phys. Sin. 53 506 (in Chinese) [刘元富、张谷令、王久丽、刘赤子、杨思泽 2004 物理学报 53 506]
[17] Volinsky A A, Moody N R, Gerberich W W 2002 Acta Mater 50 441
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[1] Peter P, Boris N, Miha C, Anton Z 1999 Vacuum 53 127
[2] Lee S Y, Wang S C, Chen J S, Huang J L 2007 Surf. Coat. Technol. 202 977
[3] Barshiliaa H C, Prakasha M S, Jainb A, Rajam K S 2005 Vacuum 77 169
[4] Jeong J J, Hwang S K, Lee C M 2002 Surf. Coat. Technol. 151—152 82
[5] Ohnuma H, Nihira N, Mistuo A, Toyoda K, Kubota K, Aizawa T 2004 Surf. Coat. Technol. 177—178 623
[6] Kim G S, Lee S Y, Hahn J H. 2005 Surf. Coat. Technol. 193 213
[7] Fox-Rabinovich G S, Weatherly G C, Dodonov A I, Kovalev A I, Shuster L S, Veldhuis S C, Dosbaeva G K, Wainstein D L, Migranov M S 2004 Surf. Coat. Technol. 177—178 800
[8] Mo J L, Zhu M H, Lei B, Leng Y X, Huang N 2007 Wear 263 1423
[9] Luo Q H, Yang H S, Lu Y H, Lou Y Z, Yu D L, Wang Y B 2010 J. Aeronaut. Mater. 30 46 (in Chinese) [罗庆洪、杨会生、陆永浩、娄艳芝、于栋利、王燕斌. 2010 航空材料学报 30 46]
[10] Chen J T, Wang J, Zhang F, Zhang G A, Fan X Y, Wu Z G, Yan P X 2008 J. Alloys Comp. 124 245
[11] Fang Z B, Gong H X, Liu X Q, Xu D Y, Huang C M, Wang Y Y 2003 Acta Phys. Sin. 52 1749 (in Chinese) [方泽波、龚恒翔、刘雪芹、徐大印、黄春明、王印月 2003 物理学报 52 1749]
[12] Feng W R, Yan D R, He J N, Chen G L, Gu W C, Zhang G L, Liu C Z, Yang S Z 2005 Acta Phys. Sin. 54 2400 (in Chinese)[冯文然、阎殿然、何继宁、陈光良、顾伟超、张谷令、刘赤子、杨思泽 2005 物理学报 54 2400]
[13] Li H K, Lin G Q, Dong C 2010 Acta Phys. Sin. 59 4301 (in Chinese) [李红凯、林国强、董 闯 2010 物理学报 59 4301]
[14] Mo J L 2008 Ph.D. Dissertation (Chengdn: Southwest Jiaotong University) (in Chinese) [莫继良 2008 博士学位论文(成都:西南交通大学)]
[15] Zhang D Y, Deng M, Peng W Y, Xu L P, Yang C Y 1997 Trans. Metal Heat Treat. 18 40 (in Chinese) [张德元、邓 鸣、彭文屹、许兰萍、杨春燕 1997 金属热处理学报 18 40]
[16] Liu Y F, Zhang G L, Wang J L, Liu C Z, Yang S Z 2004 Acta Phys. Sin. 53 506 (in Chinese) [刘元富、张谷令、王久丽、刘赤子、杨思泽 2004 物理学报 53 506]
[17] Volinsky A A, Moody N R, Gerberich W W 2002 Acta Mater 50 441
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