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Molecular dynamics simulations are carried out to investigate the effect of low energy CH radical on the growth of hydrogenated carbon film. The results show that the adsorption rate of CH on clear diamond(111) is about 98%, while on hydrogenated diamond (111) the adsorption rate is lower than 1%. It indicates that the selective adsorption of low energy CH radical at the unsaturated surface C site is the dominated mechanism of the hydrogenated carbon film growth in PECVD.
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Keywords:
- carbon film growth /
- CH radical /
- molecular dynamics simulation
[1] 李红轩, 吉利, 赵飞, 杜雯, 周惠娣, 陈建敏 2010 物理学报 59 514]
[2] Erdemir A 2004 Tribo. Inter. 37 577
[3] Eryilmaz O L, Erdemir A 2007 Surf. Coat. Technol. 201 7401
[4] Zhao F, Li H X, Ji L, Mo Y F, Quan W L, Du W, Zhou H D, ChenJ M 2009 Surf. Coat. Technol. 203 981
[5] Eryilmaz O L, Erdemir A 2008 Surf. Coat. Technol. 203 750
[6] Fontaine J, Mogne T L, Loubet J L, Belin M 2005 Thin Solid Films482 99
[7] Yamazato M, Mizuma I, Higa A 2010 Diamond. Relat. Mater. 19695
[8] Wang X, Wang P, Yang S R, Zhang J Y 2008 Wear 265 1708
[9] Lifshitz Y 2003 Diamond. Relat. Mater. 12 130
[10] Wang Q, Wang C B, Wang Z, Zhang J Y, He D Y 2008 Appl. Surf.Sci. 255 1836
[11] Wu L H, Zhang X Z, Yu Y, Wan C H, Tan X Y 2011 Acta Phys.Sin. 60 037807 (in Chinese) [吴利华, 章晓中, 于奕, 万蔡华, 谭新玉 2011 物理学报 60 037807]
[12] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys. Conf.Series 86 012020
[13] Jäger H U, Yu Belov A 2003 Phys. Rev. B 68 024201
[14] Marks N 2005 Diamond. Relat. Mater. 14 1223
[15] Ma T B, Hu Y Z, Wang H 2009 Diamond. Relat. Mater. 18 88
[16] Ma T B, Hu Y Z, Wang H, Li X 2007 Phys. Rev. B 75 035425
[17] Ma T B, Hu Y Z, Wang H 2007 Acta Phys. Sin. 56 1129 (in Chinese) [马天宝, 胡元中, 王慧 2007 物理学报 56 1129]
[18] Guo F, Meng C L, Zhou L Z, Qiu Q 2007 Appl. Surf. Sci. 2538517
[19] Zhang Y J, Dong G N, Mao J H, Xie Y B 2007 Chin. Sci. Bull 522813 (in Chinese) [张宇军, 董光能, 毛军红, 谢友柏 2007 科学通报 52 2813
[20] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Phys. Lett. A 374 2150
[21] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Chin. Phys. Lett. 27 088102
[22] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Acta Phys. Sin. 59 514 (in Chinese) [权伟龙,
[23] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009Acta Phys. Sin. 58 7815 (in Chinese) [唐超, 吉璐, 孟利军, 孙立忠, 张凯旺, 钟建新 2009 物理学报 58 7815]
[24] Brenner D W, Shenderova O A, Harrison J A, Stuart S J, Ni B,Sinnott S B 2002 J. Phys. Condens. Mat. 14 783
[25] Berendsen H J C, Postma J P M, Vangunsteren W F, Dinola A,Haark J R 1984 J. Chem. Phys. 81 3684
[26] Hu Y H, Sinnott S B 2004 J. Comput. Phys. 200 251
[27] Rapaport D C 2004 The Art of Molecular Dynamics Simulations(2nd Ed.) (New York: Cambridge University Press) p308
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[1] 李红轩, 吉利, 赵飞, 杜雯, 周惠娣, 陈建敏 2010 物理学报 59 514]
[2] Erdemir A 2004 Tribo. Inter. 37 577
[3] Eryilmaz O L, Erdemir A 2007 Surf. Coat. Technol. 201 7401
[4] Zhao F, Li H X, Ji L, Mo Y F, Quan W L, Du W, Zhou H D, ChenJ M 2009 Surf. Coat. Technol. 203 981
[5] Eryilmaz O L, Erdemir A 2008 Surf. Coat. Technol. 203 750
[6] Fontaine J, Mogne T L, Loubet J L, Belin M 2005 Thin Solid Films482 99
[7] Yamazato M, Mizuma I, Higa A 2010 Diamond. Relat. Mater. 19695
[8] Wang X, Wang P, Yang S R, Zhang J Y 2008 Wear 265 1708
[9] Lifshitz Y 2003 Diamond. Relat. Mater. 12 130
[10] Wang Q, Wang C B, Wang Z, Zhang J Y, He D Y 2008 Appl. Surf.Sci. 255 1836
[11] Wu L H, Zhang X Z, Yu Y, Wan C H, Tan X Y 2011 Acta Phys.Sin. 60 037807 (in Chinese) [吴利华, 章晓中, 于奕, 万蔡华, 谭新玉 2011 物理学报 60 037807]
[12] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys. Conf.Series 86 012020
[13] Jäger H U, Yu Belov A 2003 Phys. Rev. B 68 024201
[14] Marks N 2005 Diamond. Relat. Mater. 14 1223
[15] Ma T B, Hu Y Z, Wang H 2009 Diamond. Relat. Mater. 18 88
[16] Ma T B, Hu Y Z, Wang H, Li X 2007 Phys. Rev. B 75 035425
[17] Ma T B, Hu Y Z, Wang H 2007 Acta Phys. Sin. 56 1129 (in Chinese) [马天宝, 胡元中, 王慧 2007 物理学报 56 1129]
[18] Guo F, Meng C L, Zhou L Z, Qiu Q 2007 Appl. Surf. Sci. 2538517
[19] Zhang Y J, Dong G N, Mao J H, Xie Y B 2007 Chin. Sci. Bull 522813 (in Chinese) [张宇军, 董光能, 毛军红, 谢友柏 2007 科学通报 52 2813
[20] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Phys. Lett. A 374 2150
[21] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Chin. Phys. Lett. 27 088102
[22] QuanWL, Li H X, Zhao F, Ji L, DuW, Zhou H D, Chen JM2010Acta Phys. Sin. 59 514 (in Chinese) [权伟龙,
[23] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009Acta Phys. Sin. 58 7815 (in Chinese) [唐超, 吉璐, 孟利军, 孙立忠, 张凯旺, 钟建新 2009 物理学报 58 7815]
[24] Brenner D W, Shenderova O A, Harrison J A, Stuart S J, Ni B,Sinnott S B 2002 J. Phys. Condens. Mat. 14 783
[25] Berendsen H J C, Postma J P M, Vangunsteren W F, Dinola A,Haark J R 1984 J. Chem. Phys. 81 3684
[26] Hu Y H, Sinnott S B 2004 J. Comput. Phys. 200 251
[27] Rapaport D C 2004 The Art of Molecular Dynamics Simulations(2nd Ed.) (New York: Cambridge University Press) p308
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