Influence of radio frequency power on the structure and optical properties of glow discharge polymer films

Niu Zhong-Cai; He Zhi-Bing; Zhang Ying; Wei Jian-Jun; Liao Guo; Du Kai; Tang Yong-Jian

doi:10.7498/aps.61.106804

Abstract

Taking advantage of triple radio frequency, hydrocarbon polymer films are fabricated at different powers by the glow discharge polymerization technology. The deposition rates, the chemical structures, the atomic ratios and the optical properties are studied. The thicknesses of glow discharge polymer (GDP) films are measured by the surface profiler technology. The chemical compositions of GDP films are characterized by FT-IR spectra and element analysis. The optical properties of GDP films are investigated by UV-VIS spectra. With RF power increasing from 20 W to 60 W, the deposition rate of GDP films first increases 0.34 μ m/h, then decreases after the RF power reaches 40 W. In visible light area more than 500 nm, the optical transmittances of all GDP films are more than 90%.The optical band gaps of GDP films first decrease, then reaches the minimum at the RF power of 50 W, then increases when the RF power increases from 20 W to 60 W.

Keywords:

Authors and contacts

1.
Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, China;
2.
The Centre of Laser Fusion Research, China Academy of Engineering Physics, Mianyang 621900, China

References

[1]	Zhang J, Chang T Q 2004 Fundaments of the Target Physics for Laser Fusion (Vol.1) (Beijing: Satate Defense Industry Press) pp1-5 (in Chinese) [张钧, 常铁强 2004 激光核聚变靶物理基础 (第一版) (北京:国防工业出版社) 第1-5页]
[2]	Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫东, 刘兴华, 杨向东 2009 物理学报 58 6436]
[3]	Mcquillan B W, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 GA-A22494
[4]	Yan J C, He Z B, Yang Z L, Zhang Y, Tang Y J, Wei J J 2011 Acta Phys. Sin. 60 036501 (in Chinese) [闫建成, 何智兵, 阳志林, 张颖, 唐永建, 韦建军 2011 物理学报 60 036501]
[5]	Bouquet N A, Cook R, McQuillan B W, Paguio R, Takagi M 2003 Generral Atomic Report GA-A24483
[6]	Alger E, Antipa N, Biesiada T, Bhandarkar S, Castro C, Chen K C, Choate C, Condor A, Dzenitis B, Fair J, Farrell M, Giraldez E, Hamza A, Horner J, Huang H, Johnson M, Kroll J, MorenoK, Montesanti R, Nikroo A, Parham T, Reynolds J, Stadermann M, Suratwala T, Taylor J, Wegner P 2010 Ignition Campaign Target Fabrication, Llnl-ar-459204
[7]	Nikroo A, Castillo E, Hilla D, Greenwood A L 2003 General Atomics Report GA-A24453
[8]	Biener J, Mirkarimi P B, Tringe J W, Baker S L, Wang Y M, Kucheyev S O, Teslich N E, Wu K J, Hamza A V, Wild C, Woerner E, Koidl P, Bruehne K, Fecht H J 2006 Fusion Science and Technology 49 737
[9]	Chen K C, Cook R C, Huang H 2006 Fusion Science and Technology 49 750
[10]	Wu W D, Luo J S, Huang Y, Zhang Z W 2000 High Power Laser and Particle Beam 5 593 (in Chinese) [吴卫东, 罗江山, 黄勇, 张占文 2000 强激光与粒子束 12 593]
[11]	Bauer M, Schwarz-Selinger T, Jacob W 2005 J. Appl. Phys. 98 073302-I
[12]	Jiang X, Beyer W, Reichelt K 1990 J. Appl. Phys. 68 1378
[13]	Li H X, Xu Z, Chen J M, Zhou H T, Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese) [李红轩, 徐洮, 陈建敏, 周惠娣, 刘惠文 2005 物理学报 54 1885]
[14]	Hirakuri K K, Minorikawa T, Friedbacher G 1997 Thin Solid Film 302 5
[15]	Wexler A S 1967 Appl. Spectros. Rev. 1 29
[16]	Easton C D, Jacob M V 2009 Thin Solid Film 517 4402
[17]	Czechowicz D G, Casillo E R, Nikroo A 2002 General Atomics Report GA-A23753
[18]	Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 物理学报 60 028105]
[19]	Zeng L G, Liu F M, Zhong F W, Ding P, Cai L G, Zhou C C 2011 Acta Phys. Sin. 60 038203 (in Chinese) [曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 物理学报 60 038203]
[20]	Choi S, Lee K R, Oh S G, Lee S 2001 Appl. Surf. Sci. 247 217
[21]	Liu X H, Wu W D, He Z B, Zhang B L, Wang H B, Cai C Z 2009 High Power Laser and Particle Beam 21 1853 (in Chinese) [刘兴华, 吴卫东, 何智兵, 张宝玲, 王洪斌, 蔡从中 2009 强激光与粒子束 21 1853]
[22]	Wang X, Harris H R, Bouldin K, Temkin H, Gangopadhyay S, Strathman M D, West M 2001 Appl. Phys. 87 621

Cited By

[1]	Zhang J, Chang T Q 2004 Fundaments of the Target Physics for Laser Fusion (Vol.1) (Beijing: Satate Defense Industry Press) pp1-5 (in Chinese) [张钧, 常铁强 2004 激光核聚变靶物理基础 (第一版) (北京:国防工业出版社) 第1-5页]
[2]	Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫东, 刘兴华, 杨向东 2009 物理学报 58 6436]
[3]	Mcquillan B W, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 GA-A22494
[4]	Yan J C, He Z B, Yang Z L, Zhang Y, Tang Y J, Wei J J 2011 Acta Phys. Sin. 60 036501 (in Chinese) [闫建成, 何智兵, 阳志林, 张颖, 唐永建, 韦建军 2011 物理学报 60 036501]
[5]	Bouquet N A, Cook R, McQuillan B W, Paguio R, Takagi M 2003 Generral Atomic Report GA-A24483
[6]	Alger E, Antipa N, Biesiada T, Bhandarkar S, Castro C, Chen K C, Choate C, Condor A, Dzenitis B, Fair J, Farrell M, Giraldez E, Hamza A, Horner J, Huang H, Johnson M, Kroll J, MorenoK, Montesanti R, Nikroo A, Parham T, Reynolds J, Stadermann M, Suratwala T, Taylor J, Wegner P 2010 Ignition Campaign Target Fabrication, Llnl-ar-459204
[7]	Nikroo A, Castillo E, Hilla D, Greenwood A L 2003 General Atomics Report GA-A24453
[8]	Biener J, Mirkarimi P B, Tringe J W, Baker S L, Wang Y M, Kucheyev S O, Teslich N E, Wu K J, Hamza A V, Wild C, Woerner E, Koidl P, Bruehne K, Fecht H J 2006 Fusion Science and Technology 49 737
[9]	Chen K C, Cook R C, Huang H 2006 Fusion Science and Technology 49 750
[10]	Wu W D, Luo J S, Huang Y, Zhang Z W 2000 High Power Laser and Particle Beam 5 593 (in Chinese) [吴卫东, 罗江山, 黄勇, 张占文 2000 强激光与粒子束 12 593]
[11]	Bauer M, Schwarz-Selinger T, Jacob W 2005 J. Appl. Phys. 98 073302-I
[12]	Jiang X, Beyer W, Reichelt K 1990 J. Appl. Phys. 68 1378
[13]	Li H X, Xu Z, Chen J M, Zhou H T, Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese) [李红轩, 徐洮, 陈建敏, 周惠娣, 刘惠文 2005 物理学报 54 1885]
[14]	Hirakuri K K, Minorikawa T, Friedbacher G 1997 Thin Solid Film 302 5
[15]	Wexler A S 1967 Appl. Spectros. Rev. 1 29
[16]	Easton C D, Jacob M V 2009 Thin Solid Film 517 4402
[17]	Czechowicz D G, Casillo E R, Nikroo A 2002 General Atomics Report GA-A23753
[18]	Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 物理学报 60 028105]
[19]	Zeng L G, Liu F M, Zhong F W, Ding P, Cai L G, Zhou C C 2011 Acta Phys. Sin. 60 038203 (in Chinese) [曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 物理学报 60 038203]
[20]	Choi S, Lee K R, Oh S G, Lee S 2001 Appl. Surf. Sci. 247 217
[21]	Liu X H, Wu W D, He Z B, Zhang B L, Wang H B, Cai C Z 2009 High Power Laser and Particle Beam 21 1853 (in Chinese) [刘兴华, 吴卫东, 何智兵, 张宝玲, 王洪斌, 蔡从中 2009 强激光与粒子束 21 1853]
[22]	Wang X, Harris H R, Bouldin K, Temkin H, Gangopadhyay S, Strathman M D, West M 2001 Appl. Phys. 87 621

[1]	Ding Ye-Zhang, Ye Yin, Li Duo-Sheng, Xu Feng, Lang Wen-Chang, Liu Jun-Hong, Wen Xin. Molecular dynamics simulation of graphene deposition and growth on WC-Co cemented carbides. Acta Physica Sinica, 2023, 72(6): 068703. doi: 10.7498/aps.72.20221332
[2]	Huang Shen-Yang, Zhang Guo-Wei, Wang Fan-Jie, Lei Yu-Chen, Yan Hu-Gen. Optical properties of two-dimensional black phosphorus. Acta Physica Sinica, 2021, 70(2): 027802. doi: 10.7498/aps.70.20201497
[3]	Yan Jun, Wang Zi-Yi, Zeng Ruo-Sheng, Zou Bing-Suo. Zero-dimensional Sb³⁺ doped Rb₇Bi₃Cl₁₆ metal halides with triplet self-trapped exciton emission. Acta Physica Sinica, 2021, 70(24): 247801. doi: 10.7498/aps.70.20211024
[4]	Zhang Xiao-Ya, Song Jia-Xun, Wang Xin-Hao, Wang Jin-Bin, Zhong Xiang-Li. First principles calculation of optical absorption and polarization properties of In doped h-LuFeO₃. Acta Physica Sinica, 2021, 70(3): 037101. doi: 10.7498/aps.70.20201287
[5]	Pan Feng-Chun, Lin Xue-Ling, Cao Zhi-Jie, Li Xiao-Fu. Electronic structures and optical properties of Fe, Co, and Ni doped GaSb. Acta Physica Sinica, 2019, 68(18): 184202. doi: 10.7498/aps.68.20190290
[6]	Sun Zhi-Zheng, Xun Wei, Zhang Jia-Yong, Liu Chuan-Yang, Zhong Jia-Lin, Wu Yin-Zhong. Optical properties of BaTiO₃ and its volume effects. Acta Physica Sinica, 2019, 68(8): 087801. doi: 10.7498/aps.68.20182087
[7]	Su Rui, Zhang Hong, Jiang Sheng-Li, Chen Jun, Han Wei. Quasi-particle calculations on electronic and optical properties of the peroxy linkage and neutral oxygen vacancy defects in amorphous silica. Acta Physica Sinica, 2016, 65(2): 027801. doi: 10.7498/aps.65.027801
[8]	Jin Qin, Dong Hai-Ming, Han Kui, Wang Xue-Feng. Ultrafast dynamic optical properties of graphene. Acta Physica Sinica, 2015, 64(23): 237801. doi: 10.7498/aps.64.237801
[9]	Liu Jian, Liu Ting-Yu, Li Hai-Xin, Liu Feng-Ming. Study on the electronic structures and the optical absorption mechanism of In2O3 crystals. Acta Physica Sinica, 2015, 64(19): 193101. doi: 10.7498/aps.64.193101
[10]	Wang Jin, Li Chun-Mei, Ao Jing, Li Feng, Chen Zhi-Qian. Elastic and optical properties of IVB group transition-metal nitrides. Acta Physica Sinica, 2013, 62(8): 087102. doi: 10.7498/aps.62.087102
[11]	Li Zhi-Guo, Liu Wei, He Jing-Jing, Li Zu-Liang, Han An-Jun, Zhang Chao, Zhou Zhi-Qiang, Zhang Yi, Sun Yun. Influences of deposition rate in second stage on the Cu(In,Ga)Se2 thin film and device prepared by low-temperature process. Acta Physica Sinica, 2013, 62(3): 038803. doi: 10.7498/aps.62.038803
[12]	Pan Lei, Lu Tie-Cheng, Su Rui, Wang Yue-Zhong, Qi Jian-Qi, Fu Jia, Zhang Yi, He Duan-Wei. Study of electronic structure and optical propertise of -AlON crystal. Acta Physica Sinica, 2012, 61(2): 027101. doi: 10.7498/aps.61.027101
[13]	Feng Xian-Yang, Lu Yao, Jiang Lei, Zhang Guo-Lian, Zhang Chang-Wen, Wang Pei-Ji. Study of the optical properties of superlattices ZnO doped with indium. Acta Physica Sinica, 2012, 61(5): 057101. doi: 10.7498/aps.61.057101
[14]	Wang Hong-Yan, Zhang Zhi-Dong, Zhang Zhong-Yue, Sun Zhong-Hua. Optical properties of gold nanoring structures. Acta Physica Sinica, 2011, 60(4): 047808. doi: 10.7498/aps.60.047808
[15]	Li Xu-Zhen, Xie Quan, Chen Qian, Zhao Feng-Juan, Cui Dong-Meng. The study on the electronic structure and optical properties of OsSi2. Acta Physica Sinica, 2010, 59(3): 2016-2021. doi: 10.7498/aps.59.2016
[16]	Cen Min, Zhang Yue-Guang, Chen Wei-Lan, Gu Pei-Fu. Influences of deposition rate and oxygen partial pressure on residual stress of HfO2 films. Acta Physica Sinica, 2009, 58(10): 7025-7029. doi: 10.7498/aps.58.7025
[17]	Guan Li, Liu Bao-Ting, Li Xu, Zhao Qing-Xun, Wang Ying-Long, Guo Jian-Xin, Wang Shu-Biao. Electronic structure and optical properties of fluorite-structure TiO2. Acta Physica Sinica, 2008, 57(1): 482-487. doi: 10.7498/aps.57.482
[18]	Duan Man-Yi, Xu Ming, Zhou Hai-Ping, Chen Qing-Yun, Hu Zhi-Gang, Dong Cheng-Jun. Electronic structure and optical properties of ZnO doped with carbon. Acta Physica Sinica, 2008, 57(10): 6520-6525. doi: 10.7498/aps.57.6520
[19]	Xing Hai-Ying, Fan Guang-Han, Zhao De-Gang, He Miao, Zhang Yong, Zhou Tian-Ming. Electronic structure and optical properties of GaN with Mn-doping. Acta Physica Sinica, 2008, 57(10): 6513-6519. doi: 10.7498/aps.57.6513
[20]	Shen Yi-Bin, Zhou Xun, Xu Ming, Ding Ying-Chun, Duan Man-Yi, Linghu Rong-Feng, Zhu Wen-Jun. Electronic structure and optical properties of ZnO doped with transition metals. Acta Physica Sinica, 2007, 56(6): 3440-3445. doi: 10.7498/aps.56.3440

Catalog

Vol. 61, Issue 10 - 2012-05-20

Metrics

Abstract views: 7231
PDF Downloads: 531
Cited By: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

Search

Article

留言板