A 3D profile evolution method of ion etching simulation based on compression representation

Yang Hong-Jun; Song Yi-Xu; Zheng Shu-Lin; Jia Pei-Fa

doi:10.7498/aps.62.208201

Search

x

Yang Hong-Jun, Song Yi-Xu, Zheng Shu-Lin, Jia Pei-Fa. A 3D profile evolution method of ion etching simulation based on compression representationJ. Acta Physica Sinica, 2013, 62(20): 208201. DOI: 10.7498/aps.62.208201

Citation:

Yang Hong-Jun, Song Yi-Xu, Zheng Shu-Lin, Jia Pei-Fa. A 3D profile evolution method of ion etching simulation based on compression representationJ. Acta Physica Sinica, 2013, 62(20): 208201. DOI: 10.7498/aps.62.208201

Citation:

Yang Hong-Jun, Song Yi-Xu, Zheng Shu-Lin, Jia Pei-Fa. A 3D profile evolution method of ion etching simulation based on compression representationJ. Acta Physica Sinica, 2013, 62(20): 208201. DOI: 10.7498/aps.62.208201