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The growth of thin amorphous hydrogenated carbon films (a-C:H) on diamond (111) surface from the bombardment of CH2 radicals is studied using molecular dynamics simulations. Structural analysis shows that the local structure (e.g., the first coordination number of C atoms) of a-C:H depends critically on the content of hydrogen. The increase in kinetic energy of incident radicals leads to the decrease of hydrogen content, which subsequently changes the proportion of sp3 bonded C atoms in a-C:H.
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Keywords:
- amorphous hydrogenated carbon films /
- diamond (111) surface /
- molecular dynamics simulations
[1] Maya P N, Toussaint U V, Jacob W 2013 Diamond Related Materials 40 41
[2] Biener J, Ho D D, Wild C, Woerner E, Biener M M, El-dasher B S, Hicks D G, Eggert J H, Celliers P M, Collins G W, Teslich Jr N E, Kozioziemski B J, Haan S W, Hamza A V 2009 Nuclear Fusion 49 112001
[3] [4] [5] Lan H-Q, Xu C 2012 Acta Phys. Sin. 61 133101 (in Chinese) [兰惠清, 徐藏 2012 物理学报 61 133101]
[6] [7] Wang C-B, Shi J, Geng Z-R, Zhang J-Y 2012 Chin. Phys. Lett. 29 056201
[8] Hurricane O A, Callahan D A, Casey D T, Celliers P M, Cerjan C, Dewald E L, Dittrich T R, Dppner T, Hinkel D E, Berzak Hopkins L F, Kline J L, Le Pape S, Ma T, MacPhee A G, Milovich J L, Pak A, Park H S, Patel P K, Remington B A, Salmonson J D, Springer P T, Tommasini T 2014 Nature 506 343
[9] [10] Quan W L, Sun X W, Song Q, Fu Z J, Guo P, Tian J H, Chen J M 2012 Appl. Surf. Sci. 263 339
[11] [12] Wang J, Liu G-C, Wang L-D, Deng X-L, and Xu J 2008 Chin. Phys. B 17 3108
[13] [14] Jiang J-L, Huang H, Wang Q et al. 2014 Acta Phys. Sin. 63 028104 (in Chinese) [姜金龙, 黄浩, 王琼等 2014 物理学报 63 028104]
[15] [16] [17] Zhang P Z, Li R S, Pan X J, and Xie E Q 2013 Chin. Phys. B 22 058106
[18] [19] Umar Z A, Rawat R S, Ahmad R, Kumar A K, Wang Y, Hussain T, Chen Z, Shen L, and Zhang Z 2014 Chin. Phys. B 23 025204
[20] [21] Zhang L, Ma G J, Lin G Q, Ma H, and Han K C 2014 Chin. Phys. B 23 048102
[22] [23] Jger H U, Albe K 2000 J. Appl. Phys. 88 1129
[24] [25] Sharma A R, Schneider R, Toussaint U, Nordlund K 2007 J Nucl. Mater. 363365 1283
[26] [27] Marks N A 2005 Diamond Related Materials 14 1223
[28] [29] Ma T B, Hu Y Z, Wang H 2006 Acta Phys. Sin. 55 2922 (in Chinese) [马天宝, 胡元中, 王慧 2006 物理学报 55 2922]
[30] Neyts E, Bogaerts A, van de Sanden M C M 2006 Appl. Phys. Lett. 88 141922
[31] [32] Neyts E, Tacq M, Bogaerts A 2006 Diamond Related Materials 15 1663
[33] [34] [35] Neyts E, Eckert M, Bogaerts A 2007 Chem. Vap. Deposition 13 312
[36] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys.: Conf. Ser. 86 012020
[37] [38] Quan W L, Li H X, Zhao F, Ji L, Du W, Zhou H D, Chen J M 2010 Phys. Lett. A 374 2150
[39] [40] [41] Quan W L, Li H X, Zhao F, Ji L, Du W, Zhou H D, Chen J M 2010 Chin. Phys. Lett. 27 088102
[42] [43] Stuart S J, Tutein A B, Harrison J A 2000 J. Chem. Phys. 112 6472
[44] [45] -
[1] Maya P N, Toussaint U V, Jacob W 2013 Diamond Related Materials 40 41
[2] Biener J, Ho D D, Wild C, Woerner E, Biener M M, El-dasher B S, Hicks D G, Eggert J H, Celliers P M, Collins G W, Teslich Jr N E, Kozioziemski B J, Haan S W, Hamza A V 2009 Nuclear Fusion 49 112001
[3] [4] [5] Lan H-Q, Xu C 2012 Acta Phys. Sin. 61 133101 (in Chinese) [兰惠清, 徐藏 2012 物理学报 61 133101]
[6] [7] Wang C-B, Shi J, Geng Z-R, Zhang J-Y 2012 Chin. Phys. Lett. 29 056201
[8] Hurricane O A, Callahan D A, Casey D T, Celliers P M, Cerjan C, Dewald E L, Dittrich T R, Dppner T, Hinkel D E, Berzak Hopkins L F, Kline J L, Le Pape S, Ma T, MacPhee A G, Milovich J L, Pak A, Park H S, Patel P K, Remington B A, Salmonson J D, Springer P T, Tommasini T 2014 Nature 506 343
[9] [10] Quan W L, Sun X W, Song Q, Fu Z J, Guo P, Tian J H, Chen J M 2012 Appl. Surf. Sci. 263 339
[11] [12] Wang J, Liu G-C, Wang L-D, Deng X-L, and Xu J 2008 Chin. Phys. B 17 3108
[13] [14] Jiang J-L, Huang H, Wang Q et al. 2014 Acta Phys. Sin. 63 028104 (in Chinese) [姜金龙, 黄浩, 王琼等 2014 物理学报 63 028104]
[15] [16] [17] Zhang P Z, Li R S, Pan X J, and Xie E Q 2013 Chin. Phys. B 22 058106
[18] [19] Umar Z A, Rawat R S, Ahmad R, Kumar A K, Wang Y, Hussain T, Chen Z, Shen L, and Zhang Z 2014 Chin. Phys. B 23 025204
[20] [21] Zhang L, Ma G J, Lin G Q, Ma H, and Han K C 2014 Chin. Phys. B 23 048102
[22] [23] Jger H U, Albe K 2000 J. Appl. Phys. 88 1129
[24] [25] Sharma A R, Schneider R, Toussaint U, Nordlund K 2007 J Nucl. Mater. 363365 1283
[26] [27] Marks N A 2005 Diamond Related Materials 14 1223
[28] [29] Ma T B, Hu Y Z, Wang H 2006 Acta Phys. Sin. 55 2922 (in Chinese) [马天宝, 胡元中, 王慧 2006 物理学报 55 2922]
[30] Neyts E, Bogaerts A, van de Sanden M C M 2006 Appl. Phys. Lett. 88 141922
[31] [32] Neyts E, Tacq M, Bogaerts A 2006 Diamond Related Materials 15 1663
[33] [34] [35] Neyts E, Eckert M, Bogaerts A 2007 Chem. Vap. Deposition 13 312
[36] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys.: Conf. Ser. 86 012020
[37] [38] Quan W L, Li H X, Zhao F, Ji L, Du W, Zhou H D, Chen J M 2010 Phys. Lett. A 374 2150
[39] [40] [41] Quan W L, Li H X, Zhao F, Ji L, Du W, Zhou H D, Chen J M 2010 Chin. Phys. Lett. 27 088102
[42] [43] Stuart S J, Tutein A B, Harrison J A 2000 J. Chem. Phys. 112 6472
[44] [45]
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