Design of circular composite sputtering cathode and simulation of its discharge characteristics

Wang Tian-Long; Qiu Qing-Quan; Jing Li-Wei; Zhang Xiao-Bo

doi:10.7498/aps.67.20172576

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Wang Tian-Long, Qiu Qing-Quan, Jing Li-Wei, Zhang Xiao-Bo. Design of circular composite sputtering cathode and simulation of its discharge characteristicsJ. Acta Physica Sinica, 2018, 67(7): 070703. DOI: 10.7498/aps.67.20172576

Citation:

Wang Tian-Long, Qiu Qing-Quan, Jing Li-Wei, Zhang Xiao-Bo. Design of circular composite sputtering cathode and simulation of its discharge characteristicsJ. Acta Physica Sinica, 2018, 67(7): 070703. DOI: 10.7498/aps.67.20172576

Citation:

Wang Tian-Long, Qiu Qing-Quan, Jing Li-Wei, Zhang Xiao-Bo. Design of circular composite sputtering cathode and simulation of its discharge characteristicsJ. Acta Physica Sinica, 2018, 67(7): 070703. DOI: 10.7498/aps.67.20172576