First-principles study on the diffusion dynamics of Al atoms on Si surface

Zhang Heng; Huang Yan; Shi Wang-Zhou; Zhou Xiao-Hao; Chen Xiao-Shuang

doi:10.7498/aps.68.20190783

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Zhang Heng, Huang Yan, Shi Wang-Zhou, Zhou Xiao-Hao, Chen Xiao-Shuang. First-principles study on the diffusion dynamics of Al atoms on Si surfaceJ. Acta Physica Sinica, 2019, 68(20): 207302. DOI: 10.7498/aps.68.20190783

Citation:

Zhang Heng, Huang Yan, Shi Wang-Zhou, Zhou Xiao-Hao, Chen Xiao-Shuang. First-principles study on the diffusion dynamics of Al atoms on Si surfaceJ. Acta Physica Sinica, 2019, 68(20): 207302. DOI: 10.7498/aps.68.20190783

Citation:

Zhang Heng, Huang Yan, Shi Wang-Zhou, Zhou Xiao-Hao, Chen Xiao-Shuang. First-principles study on the diffusion dynamics of Al atoms on Si surfaceJ. Acta Physica Sinica, 2019, 68(20): 207302. DOI: 10.7498/aps.68.20190783