Zhao Shi-Ping, Zhang Xin, Liu Zhi-Hui, Wang Quan, Wang Hua-Lin, Jiang Wei-Wei, Liu Chao-Qian, Wang Nan, Liu Shi-Min, Cui Yun-Xian, Ma Yan-Ping, Ding Wan-Yu, Ju Dong-Ying. Influence of low-energy ammonia ion/group diffusion on electrical properties of indium tin oxide filmJ. Acta Physica Sinica, 2020, 69(23): 236801. DOI: 10.7498/aps.69.20200860