A novel 4H-SiC ESD protection device with improved robustness

Chang Shuai-Jun; Ma Hai-Lun; Li Hao; Ou Shu-Ji; Guo Jian-Fei; Zhong Ming-Hao; Liu Li

doi:10.7498/aps.71.20220879

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Chang Shuai-Jun, Ma Hai-Lun, Li Hao, Ou Shu-Ji, Guo Jian-Fei, Zhong Ming-Hao, Liu Li. A novel 4H-SiC ESD protection device with improved robustnessJ. Acta Physica Sinica, 2022, 71(19): 198501. DOI: 10.7498/aps.71.20220879

Citation:

Chang Shuai-Jun, Ma Hai-Lun, Li Hao, Ou Shu-Ji, Guo Jian-Fei, Zhong Ming-Hao, Liu Li. A novel 4H-SiC ESD protection device with improved robustnessJ. Acta Physica Sinica, 2022, 71(19): 198501. DOI: 10.7498/aps.71.20220879

Citation:

Chang Shuai-Jun, Ma Hai-Lun, Li Hao, Ou Shu-Ji, Guo Jian-Fei, Zhong Ming-Hao, Liu Li. A novel 4H-SiC ESD protection device with improved robustnessJ. Acta Physica Sinica, 2022, 71(19): 198501. DOI: 10.7498/aps.71.20220879