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High-temperature superconducting films can be used for fabricating the cutting-edge high-temperature superconducting microwave devices because of their low microwave surface resistances. However, the microwave surface resistances of high-temperature superconducting materials are particularly sensitive to microstructure due to their special two-dimensional superconducting mechanisms and extremely short superconducting coherence lengths. To investigate the correlations between microstructure and microwave surface resistance of high-temperature superconducting materials, YBa2Cu3O7-δ (YBCO) films with different thickness are grown on (00l)-oriented MgO single-crystal substrates by using the pulsed laser deposition (PLD) technique. Electrical measurements reveal that their superconducting transition temperatures and room temperature resistances do not show significant difference. However, their microwave surface resistances in superconducting state display a significant difference. The characterizations of the microstructures of YBCO films by synchrotron radiation three-dimensional reciprocal space mapping(3D-RSM) technique show that the number of the grains with CuO2 face parallel to the surface (c crystals), and the consistency of grain orientation are the main causes for the difference in microwave surface resistance.
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Zhao Z X, Chen L Q, Yang Q S, Huang Y Z, Chen G H, Tang R M, Liu G R, Cui C G, Chen L, Wang L Z, Guo S Q, Li S L, Bi J Q 1987 Chin. Sci. Bull. 6 412
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图 1 3D-RSM衍射几何的示意图
Figure 1. Schematic diagram of 3D-RSM.
图 2 1#样品和2#样品 (a)直流电阻R和(b)微波表面电阻Rs对温度的依赖关系
Figure 2. Dependence of (a) DC resistance R and (b) microwave surface resistance Rs on temperature for sample 1# and sample 2#.
图 3 (a) 1#样品和(b)2#样品(108)衍射峰的3D-RSM; (c) 1#样品和(d)2#样品(108)衍射峰3D-RSM在水平面上的投影
Figure 3. (a) 3D-RSM of (108) diffraction peaks for sample 1#, and (b) sample 2#; (c) projection of (108) 3D-RSM of sample 1#, and (d) sample 2# on the horizontal plane.
图 4 (a) 1#样品和(b) 2#样品(200)衍射峰的3D-RSM
Figure 4. 3D-RSM of (a) sample #1, and (b) sample #2 around the (200) diffraction peak.
图 5 (a) 1#样品和(b) 2#样品(109)衍射峰的3D-RSM, 图中同时画出了(108)的3D-RSM; (c)和(d)是(a)和(b)在45º方向的垂直截面
Figure 5. (a) 3D-RSM of sample 1#, and (b) sample 2# around the (109) diffraction peak, while 3D-RSM of the diffraction peak of (108) are plotted in the figure; (c) and (d) are vertical cross sections of (a) and (b) in the 45º direction.
表 1 YBCO(108), (018), (109), (019), (130)衍射峰的相对强度
Table 1. Relative intensities of YBCO (108), (018), (109), (019), (130) diffraction peaks.
衍射峰实测三维积分强度 (108)(018) (109)(019)(130) 卡片上的相对强度 13 5 6 4 5 YBCO 400 nm $ 9.136\times {10}^{6} $ $ 5.974\times {10}^{6} $ YBCO 1000 nm $ 11.503\times {10}^{6} $ $ 7.769\times {10}^{6} $ 
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表 2 由(109), (019), (130)衍射峰的强度计算出的c晶/b晶比
Table 2. The c-crystal to b-crystal ratio calculated from the intensities of the (109), (019), and (130) diffraction peaks.
样品厚度 衍射峰三维积分强度 c晶/b晶比 (109), (019) (130) YBCO 400 nm $ 1.015\times {10}^{6} $ $ 0.180\times {10}^{6} $ 5.639∶1 YBCO 1000 nm $ 1.278\times {10}^{6} $ $ 0.276\times {10}^{6} $ 4.630∶1
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[1] Feng D, Ming N B, Hong J F, Yang Y S, Zhu J S, Yang Z, Wang Y N 1980 Appl. Phys. Lett. 37 607
Google Scholar
[2] Zhu S N, Zhu Y Y, Zhang Z Y, Shu H, Wang H F, Hong J F, Ge C Z 1995 J. Appl. Phys. 77 5481
Google Scholar
[3] Zhu S N, Zhu Y Y, Ming N B 1997 Science 278 843
Google Scholar
[4] Jin H, Liu F M, Xu P, Xia J L, Zhong M L, Yuan Y, Zhou J W, Gong Y X, Wang W, Zhu S N 2014 Phys. Rev. Lett. 113 103601
Google Scholar
[5] Wei D Z, Wang C W, Wang H J, Hu X P, Wei D, Fang X Y, Zhang Y, Wu D, Hu Y L, Li J W, Zhu S N, Xiao M 2018 Nat. Photonics 12 596
Google Scholar
[6] Xu T X, Switkowski K, Chen X, Liu S, Koynov K, Yu H H, Zhang H J, Wang J Y, Sheng Y, Krolikowski W 2018 Nat. Photonics 12 591
Google Scholar
[7] Wei D Z, Wang C W, Xu X Y, Wang H J, Hu Y L, Chen P C, Li J W, Zhu Y Z, Xin C, Hu X P, Zhang Y, Wu D, Chu J R, Zhu S N, Xiao M 2019 Nat. Commun. 10 1
Google Scholar
[8] Saito Y, Takao H, Tani T, Nonoyama T, Takatori K, Homma T, Nagaya T, Nakamura M 2004 Nature 432 84
Google Scholar
[9] Li P, Zhai J W, Shen B, Zhang S J, Li X L, Zhu F Y, Zhang X M 2018 Adv. Mater. 30 1705171
Google Scholar
[10] Wu M K, Ashburn J R, Torng C J, Hor P H, Meng R L, Gao L, Huang Z J, Wang Y Q, Chu C W 1987 Phys. Rev. Lett. 58 908
Google Scholar
[11] 赵忠贤, 陈立泉, 杨乾声, 黄玉珍, 陈赓华, 唐汝明, 刘贵荣, 崔长庚, 陈烈, 王连忠, 郭树权, 李山林, 毕建清 1987 科学通报 6 412
Zhao Z X, Chen L Q, Yang Q S, Huang Y Z, Chen G H, Tang R M, Liu G R, Cui C G, Chen L, Wang L Z, Guo S Q, Li S L, Bi J Q 1987 Chin. Sci. Bull. 6 412
[12] Jorgensen J D, Veal B W, Paulikas A P, Nowicki L J, Crabtree G W, Claus H, Kwok W K 1990 Phys. Rev. B 41 1863
Google Scholar
[13] Bondarenko S I, Koverya V P, Krevsun A V, Link S I 2017 Low Temp. Phys. 43 1125
Google Scholar
[14] Foltyn S R, Civale L, Macmanus-Driscoll J L, Jia Q X, Maiorov B, Wang H, Maley M 2007 Nat. Mater. 6 631
Google Scholar
[15] Obradors X, Puig T 2014 Supercond. Sci. Technol. 27 044003
Google Scholar
[16] Larbalestier D, Gurevich A, Feldmann D M, Polyanskii A 2001 Nature 414 368
Google Scholar
[17] 蔡传兵, 池长鑫, 李敏娟, 刘志勇, 鲁玉明, 郭艳群, 白传易, 陆齐, 豆文芝 2018 科学通报 64 827
Cai C B, Chi C X, Li M J, Liu Z Y, Lu Y M, Guo Y Q, Bai C Y, Lu Q, Dou W Z 2018 Chin. Sci. Bull. 64 827
[18] Newman N, Lyons W G 1993 J. Supercond. 6 119
Google Scholar
[19] 孙亮, 黎红, 张雪强, 李春光, 张强, 王佳, 边勇波, 何豫生 2012 中国科学: 物理学 力学 天文学 42 767
Google Scholar
Sun L, Li H, Zhang X Q, Li C G, Zhang Q, Wang J, Bian Y B, He Y S 2012 Sci. Sin-Phys. Mech. Astron 42 767
Google Scholar
[20] Bian Y B, Guo J, Gao C Z, Li C G, Li H, Wang B C, He X F, Li C, Li N, Li G Q, Zhang Q, Zhang X Q, Meng J B, He Y S 2010 Physica C 470 617
Google Scholar
[21] He X F, Zhang X Q, Wang Y H, Gao L, Wang J, Cui B, Bian Y B, Yu Tao, Zhang Q, Li H, Li C G, Li J J, Gu C Z, He Y S 2009 Physica C 469 1925
Google Scholar
[22] Fuchs D, Brecht E, Schweiss P, Loa I, Thomsen C, Schneider R 1997 Physica C 280 167
Google Scholar
[23] 邹春梅, 左长明, 路胜博, 催旭梅, 姬洪 2007 功能材料与器件学报 13 301
Google Scholar
ZOU C M, ZOU C M, Lu S B, Cui X M, Ji H 2007 J. Funt. Mater. Dev. 13 301
Google Scholar
[24] Shi D Q, Ko K R, Song K J, Chung J K, Choi S J, Park Y M, Shin K C, Yoo S I, Park C 2004 Supercond. Sci. Technol. 17 S42
Google Scholar
[25] Li X, Rupich M W, Kodenkandath T, Huang Y 2007 IEEE Trans. Appl. Supercond. 17 3553
Google Scholar
[26] Foltyn S R, Jia Q X, Arendt P N, Kinder L, Fan Y, Smith J F 1999 Appl. Phys. Lett. 75 3692
Google Scholar
[27] Rupich M W, Li X P, Sathyamurthy S, Thieme C L H, DeMoranville K, Gannon J, Fleshler S 2013 IEEE Trans. Appl. Supercond. 23 6601205
Google Scholar
[28] Jia Q X, Foltyn S R, Arendt P N, Smith J F 2002 Appl. Phys. Lett. 80 1601
Google Scholar
[29] Eom C B, Marshall A F, Suzuki Y, Geballe T H 1992 Phys. Rev. B 46 11902
Google Scholar
[30] Mastuda J S, Oba F, Murata T, Yamamoto T, Ikuhara Y 2004 J. Mater. Res. 19 2674
Google Scholar
[31] Tang C Y, Cai Y Q, Yao X, Rao Q L, Tao B W, Li Y R 2007 J. Phys. :Condens. Matter 19 076203
Google Scholar
[32] Wang X, Cai Y Q, Yao X, Wan W, Li F H, Xiong J, Tao B W 2008 J. Phys. D: Appl. Phys. 41 165405
Google Scholar
[33] Krivanek O L, Dellby N, Hachtel J A, Idrobo J C, Hotz M T, Plotkin-Swing B, Bacon N J, Bleloch A L, Corbin G J, Hoffman M V, Meyer C E, Lovejoy T C 2019 Ultramicroscopy 203 60
Google Scholar
[34] Wang Y, Qiu L, Zhang L L, Tang D M, Ma R X, Wang Y Z, Zhang B S, Ding F, Liu C, Cheng H M 2020 ACS Nano. 14 16823
Google Scholar
[35] Zheng H, Cao F, Zhao L G, Jiang R H, Zhao P L, Zhang Y, Wei Y J, Meng S, Li K X, Jia S F, Li L Y, Wang J B 2019 Microscopy 68 423
[36] Tang M, Yuan W T, Ou Y, Li G X, You R Y, Li S D, Yang H S, Zhang Z, Wang Y 2020 ACS Catal. 10 14419
Google Scholar
[37] Binning G, Rohrer H, Gerber C, Weibel E 1982 Appl. Phys. Lett. 40 178
Google Scholar
[38] Binning G, Quate C F, Gerber C 1986 Phys. Rev. Lett. 56 930
Google Scholar
[39] Song B, Zhao S, Shen W, Collings C, Ding S Y 2020 Front. Plant Sci. 11 479
Google Scholar
[40] Beekman C, Siemons W, Ward T Z, Chi M, Howe J, Biegalski M D, Balke N, Maksymovych P, Farrar A K, Romero J B, Gao P, Pan X Q, Tenne D A, Christen H M 2013 Adv. Mater. 25 5561
Google Scholar
[41] Zeches R J, Rossell M D, Zhang J X, Hatt A J, He Q, Yang C H, Kumar A, Wang C H, Melville A, Adamo C, Sheng G, Chu Y H, Ihlefeld J F, Erni R, Ederer C, Gopalan V, Chen L Q, Schlom D G, Spaldin N A, Martin L W, Ramesh R 2009 Science 326 977
Google Scholar
[42] Chen Z H, Prosandeev S, Luo Z L, Ren W, Qi Y J, Huang C W, You L, Gao C, Kornev I A, Wu T, Wang J L, Yang P, Sritharan T, Bellaiche L, Chen L 2011 Phys. Rev. B 84 094116
Google Scholar
[43] Chen Z H, Luo Z L, Huang C W, Qi Y J, Yang P, You L, Hu C S, Wu T, Wang J L, Gao C, Sritharan T, Chen L 2011 Adv. Funct. Mater. 21 133
Google Scholar
[44] Luo Z, Chen Z, Yang Y, Liu H J, Huang C, Huang H, Wang H, Yang M M, Hu C, Pan G, Wen W, Li X, He Q, Sritharan T, Chu Y H, Chen L, Gao C 2013 Phys. Rev. B 88 064103
Google Scholar
[45] Fewster P F 1997 Crit. Rev. Solid State Mater. Sci. 22 69
Google Scholar
[46] Li Y L, Hu S Y, Liu Z K, Chen L Q 2002 Acta Mater. 50 395
Google Scholar
[47] Xu G, Zhong Z, Hiraka H, Shirane G 2004 Phys. Rev. B 70 174109
Google Scholar
[48] Mariager S O, Schlepütz C M, Aagesen M, Sørensen C B, Johnson E, Willmott P R, Feidenhans’l R 2009 Phys. Status Solidi A 206 1771
Google Scholar
[49] Cornelius T W, Carbone D, Jacques V L R, Schülli T U, Metzger T H 2011 J. Synchrotron Radiat. 18 413
Google Scholar
[50] Cornelius T W, Davydok A, Jacques V L R, Grifone R, Schülli T, Richard M I, Beutier G, Verdier M, Metzger T H, Pietsch U, Thomas O 2012 J. Synchrotron Radiat. 19 688
Google Scholar
[51] Luo Z L, Huang H, Zhou H, Chen Z H, Yang Y, Wu L, Zhu C, Wang H, Yang M, Hu S, Wen H, Zhang X, Zhang Z, Chen L, Fong D D, Gao C 2014 Appl. Phys. Lett. 104 182901
Google Scholar
[52] Xu H, Chen Z H, Zhang X Y, Dong Y Q, Hong B, Zhao J T, Chen L, Das S, Gao C, Zeng C G, Wen H D, Luo Z L 2019 AIP Adv. 9 205114
[53] Wang R X, Xu H, Yang B, Luo Z L, Sun E W, Zhao J T, Zheng L M, Dong Y Q, Zhou H, Yang R, Gao C, Cao W W 2016 Appl. Phys. Lett. 108 152905
Google Scholar
[54] Yang L F, Zhao Y G, Zhang S, Li P S, Gao Y, Yang Y J, Huang H L, Miao P X, Liu Y, Chen A T, Nan C W, Gao C 2014 Sci. Rep. 4 4591
Google Scholar
[55] Sridhar S, Kennedy W L 1988 Rev. Sci. Instrum. 59 531
Google Scholar
[56] Barannik A A, Cherpak N T, He Y, Sun L, Zhang X, Vovnyuk M V, Wu Y 2018 Low Temp. Phys. 44 247
Google Scholar
[57] Wong-Ng W, McMurdie H F, Paretzkin B, Zhang Y M, Davis K L, Hubbard C R, Dragoo A L, Stewart J M 1987 Powder Diffr. 2 3
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