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Effect of passivation layer on back channel etching InGaZnO thin film transistors

Wang Chen Wen Pan Peng Cong Xu Meng Chen Long-Long Li Xi-Feng Zhang Jian-Hua

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Effect of passivation layer on back channel etching InGaZnO thin film transistors

Wang Chen, Wen Pan, Peng Cong, Xu Meng, Chen Long-Long, Li Xi-Feng, Zhang Jian-Hua
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  • Abstract views:  4280
  • PDF Downloads:  109
  • Cited By: 0
Publishing process
  • Received Date:  29 November 2022
  • Accepted Date:  09 January 2023
  • Available Online:  23 February 2023
  • Published Online:  20 April 2023

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