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Low-pressure radio-frequency inductively coupled discharges can produce uniformly distributed monodisperse particles and plasma densities, making them widely used in nanodevice fabrication. The manufacturing of nanodevices typically requires the generation of particles ranging from nanometer to submicron scales. These particles usually carry negative charges and can significantly influence the discharge characteristics of the plasma. This study investigates the effects of particle size and density on electron bounce resonance heating (BRH) and fundamental plasma properties in low-pressure ICPs by using a hybrid model. The hybrid model consists of kinetic equation, electromagnetic field equation, and global model equation. The simulation results show that as the dust radius or density increases, the BRH effect characterized by the formation of a plateau in the probability function of electron energy, is gradually suppressed and eventually disappears, accompanied by a decrease in electron temperature, an increase in electron density, and an increase in particle surface potential. The dust charge decreases with the increase of particle density, while exhibiting a nonmonotonic variation with particle radius. The results show that the loss of high-energy electrons caused by the dust particles may create a more favorable plasma environment for the growth of monodisperse nanoparticles with low defects. Such an improvement in particle quality is crucial for reducing trap densities and enhancing the electrical performance of nanoparticle-based electronic devices.
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Keywords:
- radio frequency plasma /
- dust plasma /
- non-locality /
- electron kinetics
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图 1 模拟的腔室结构图
Figure 1. Chamber structure in the simulation.
图 2 模拟计算程序流程图
Figure 2. The flowchart of simulation.
图 3 不同尘埃半径(a), (b)与不同尘埃密度(c), (d)情况下EEPF及放大图
Figure 3. EEPF and zoomed-in plots for different dust radii (a), (b) and different dust densities (c), (d).
图 4 电子密度和电子温度随尘埃半径(a)与尘埃密度(b)的变化
Figure 4. Variation of electron temperature, electron density, and ion density with different dust radii (a) and dust densities (b).
图 5 尘埃带电量和表面电势随尘埃半径(a)与尘埃密度(b)的变化
Figure 5. Variation of dust charge and surface potential with different dust radii (a) and dust densities (b).
图 6 尘埃收集的电子流、离子流随尘埃半径的变化
Figure 6. Dust collected electron and ion currents under different dust radii.
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