Generation of multi-source inductively coupled plasma and its diagnostics
Acta Physica Sinica
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Acta Phys. Sin.  2006, Vol. 55 Issue (7): 3494-3500    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Generation of multi-source inductively coupled plasma and its diagnostics
Xin Yu, Di Xiao-Lian, Yu Yi-Qing, Ning Zhao-Yuan
苏州大学物理科学与技术学院,江苏省薄膜材料重点实验室,苏州 215006
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