Nondestructive detection of nano grating by generalized ellipsometer
Acta Physica Sinica
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Acta Phys. Sin  2014, Vol. 63 Issue (3): 039101     doi:10.7498/aps.63.039101
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Nondestructive detection of nano grating by generalized ellipsometer
Ma Zhi-Chao1, Xu Zhi-Mou1, Peng Jing2, Sun Tang-You1, Chen Xiu-Guo3, Zhao Wen-Ning1, Liu Si-Si1, Wu Xing-Hui1, Zou Chao1, Liu Shi-Yuan3
1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
2. College of Sciences, Wuhan University of Science and Technology, Wuhan 430081, China;
3. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
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