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THE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION

ZHANG JIAN-HUA LI YI LlU JIA-RUI

THE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION

ZHANG JIAN-HUA, LI YI, LlU JIA-RUI
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  • Received Date:  02 November 1988
  • Published Online:  08 July 2005

THE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION

  • 1. (1)天津师范大学物理系; (2)中国科学院物理研究所

Abstract: The interactions between incident particles and solids in ion implantation have been in-vestigated based on the generalized Langevin equation of classical dynamics. Considering an-harmonic effects of interactions among lattice atoms the energy exchange between incident particles and target atoms, the nuclear stopping power and the distributions of project ranges have been calculated numerically. The effect of the phonon spectra excited by the incident particles has been discussed also. All calculations are in good agreement with the results of the program TRIM88 in the low energy range.

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