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Method for improving the accuracy of step height measurement based on optical frequency comb

Zhang Ji-Tao Wu Xue-Jian Li Yan Wei Hao-Yun

Method for improving the accuracy of step height measurement based on optical frequency comb

Zhang Ji-Tao, Wu Xue-Jian, Li Yan, Wei Hao-Yun
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  • Abstract views:  1923
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  • Received Date:  18 August 2011
  • Accepted Date:  28 May 2012
  • Published Online:  20 May 2012

Method for improving the accuracy of step height measurement based on optical frequency comb

  • 1. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Fund Project:  Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 51105227) and the Tsinghua University Initiative Scientific Research Program, China (Grant No. 2009THZ06057).

Abstract: An improved method of step height measurement by optical frequency comb and tunable diode laser is presented. The tunable diode laser is phase locked to the optical frequency comb, so that the output wavelength of the laser can be locked and measured in a high accuracy. Based on the principle of variable synthetic wavelength chain, the step height can be measured by tuning the wavelength of the locked tunable diode laser. This method can be used to eliminate the effect of the synthetic wavelength error on the measurement uncertainty of the step height. The stability of the phase locked laser is tested by locking a tunable diode laser to an optical frequency comb for about 5000 s. It is shown that the frequency stability of the phase locked laser is 1.810-12. The uncertainty of the step height measurement by this method is estimated to be 7.9 nm accordingly. Moreover, the measurement result of the step height can be traced to the time and frequency standard.

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