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Simulation of characteristics of ZnO/diamond/Si structure surface acoustic wave

Zhou Zhen-Kai Wei Li-Ming Feng Jie

Simulation of characteristics of ZnO/diamond/Si structure surface acoustic wave

Zhou Zhen-Kai, Wei Li-Ming, Feng Jie
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  • Abstract views:  1021
  • PDF Downloads:  1382
  • Cited By: 0
Publishing process
  • Received Date:  10 November 2012
  • Accepted Date:  11 December 2012
  • Published Online:  05 May 2013

Simulation of characteristics of ZnO/diamond/Si structure surface acoustic wave

  • 1. Institute of Systems Engineering, China Academy of Engineering Physics, Mianyang 621900, China
Fund Project:  Project supported by the Science Foundation of China Academy of Engineering Physics, China (Grant No. 2010A0302013).

Abstract: Based on the recursive stiffness matrix method, the effective surface permittitivity model of multilayered surface acoustic wave structure is established. By this model, the frequency dispersive characteristic of phase velocity for the ZnO/Si layered structure is calculated. The calculation results are in agreement with the experimental results, which verifies the effectiveness and accuracy of the model. Furthermore, the model is also established for the determination of the phase velocity and electromechanical coupling coefficients of ZnO/Diamond/Si structure. The best combination of high velocity and high coupling coefficient of the structure is obtained, which provides a good reference for the design of a high-performance and high-capability surface acoustic wave device.

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