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Nondestructive detection of nano grating by generalized ellipsometer

Ma Zhi-Chao Xu Zhi-Mou Peng Jing Sun Tang-You Chen Xiu-Guo Zhao Wen-Ning Liu Si-Si Wu Xing-Hui Zou Chao Liu Shi-Yuan

Nondestructive detection of nano grating by generalized ellipsometer

Ma Zhi-Chao, Xu Zhi-Mou, Peng Jing, Sun Tang-You, Chen Xiu-Guo, Zhao Wen-Ning, Liu Si-Si, Wu Xing-Hui, Zou Chao, Liu Shi-Yuan
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Publishing process
  • Received Date:  09 October 2013
  • Accepted Date:  20 October 2013
  • Published Online:  05 February 2014

Nondestructive detection of nano grating by generalized ellipsometer

  • 1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
  • 2. College of Sciences, Wuhan University of Science and Technology, Wuhan 430081, China;
  • 3. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
Fund Project:  Project supported by the National Natural Science Foundation of China (Grant Nos. 61076042, 60607006), the Special Project on Development of National Key Scientic Instruments and Equipment of China (Grant No. 2011YQ16000205), and the National High Technology Research and Development Program of China (Grant No. 2011AA03A106).

Abstract: The silicon nanometer structure grating and the photoresist nanometer structure grating were prepared. A fitting model was built on the new self-developed generalized ellipsometer. Then, the gratings was tested and fitted. Results proved that the machine could work well in nondestructive test of nano grating. Under the condition of the incident angle of 60 and the azimuth angle of 75, the measurement accuracy can be up to 99.97% for the three-dimensional morphology parameters such as key dimension and sidewall angle and so on, and the maximum error is less than 1%. This method is significant for the nondestructive test.

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