A STUDY OF CONCENTRATION PROFILE OF LOW-MASS IONS IMPLANTED IN METALS BY R. B. S.

QU ZHEN-YUAN; MA TIA-LIANG; GAO NAI-FEI; ZHANG HONG-TAO; XIONG JIA-JIONG

doi:10.7498/aps.33.1733

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QU ZHEN-YUAN, MA TIA-LIANG, GAO NAI-FEI, ZHANG HONG-TAO, XIONG JIA-JIONG. A STUDY OF CONCENTRATION PROFILE OF LOW-MASS IONS IMPLANTED IN METALS BY R. B. S.J. Acta Physica Sinica, 1984, 33(12): 1733-1739. DOI: 10.7498/aps.33.1733

Citation:

QU ZHEN-YUAN, MA TIA-LIANG, GAO NAI-FEI, ZHANG HONG-TAO, XIONG JIA-JIONG. A STUDY OF CONCENTRATION PROFILE OF LOW-MASS IONS IMPLANTED IN METALS BY R. B. S.J. Acta Physica Sinica, 1984, 33(12): 1733-1739. DOI: 10.7498/aps.33.1733

Citation:

QU ZHEN-YUAN, MA TIA-LIANG, GAO NAI-FEI, ZHANG HONG-TAO, XIONG JIA-JIONG. A STUDY OF CONCENTRATION PROFILE OF LOW-MASS IONS IMPLANTED IN METALS BY R. B. S.J. Acta Physica Sinica, 1984, 33(12): 1733-1739. DOI: 10.7498/aps.33.1733