A KINETIC ANALYSIS OF THE DEPOSITION MASS DISTRI-BUTION IN AN AXIAL-FLOW RF PCVD REACTOR

LIU DA-MING; LIU ZU-LI; YAO KAI-LUN; LI ZAI-GUANG

doi:10.7498/aps.40.1505

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LIU DA-MING, LIU ZU-LI, YAO KAI-LUN, LI ZAI-GUANG. A KINETIC ANALYSIS OF THE DEPOSITION MASS DISTRI-BUTION IN AN AXIAL-FLOW RF PCVD REACTORJ. Acta Physica Sinica, 1991, 40(9): 1505-1513. DOI: 10.7498/aps.40.1505

Citation:

LIU DA-MING, LIU ZU-LI, YAO KAI-LUN, LI ZAI-GUANG. A KINETIC ANALYSIS OF THE DEPOSITION MASS DISTRI-BUTION IN AN AXIAL-FLOW RF PCVD REACTORJ. Acta Physica Sinica, 1991, 40(9): 1505-1513. DOI: 10.7498/aps.40.1505

Citation:

LIU DA-MING, LIU ZU-LI, YAO KAI-LUN, LI ZAI-GUANG. A KINETIC ANALYSIS OF THE DEPOSITION MASS DISTRI-BUTION IN AN AXIAL-FLOW RF PCVD REACTORJ. Acta Physica Sinica, 1991, 40(9): 1505-1513. DOI: 10.7498/aps.40.1505