STUDIES OF INTERNAL STRESS IN DIAMOND FILMS PREPA-RED BY DC PLASMA CHEMICAL VAPOUR DEPOSITION

WANG WAN-LU; GAO JIN-TING; LIAO KE-JUN; LIU AN-MIN

doi:10.7498/aps.41.1906

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WANG WAN-LU, GAO JIN-TING, LIAO KE-JUN, LIU AN-MIN. STUDIES OF INTERNAL STRESS IN DIAMOND FILMS PREPA-RED BY DC PLASMA CHEMICAL VAPOUR DEPOSITIONJ. Acta Physica Sinica, 1992, 41(11): 1906-1912. DOI: 10.7498/aps.41.1906

Citation:

WANG WAN-LU, GAO JIN-TING, LIAO KE-JUN, LIU AN-MIN. STUDIES OF INTERNAL STRESS IN DIAMOND FILMS PREPA-RED BY DC PLASMA CHEMICAL VAPOUR DEPOSITIONJ. Acta Physica Sinica, 1992, 41(11): 1906-1912. DOI: 10.7498/aps.41.1906

Citation:

WANG WAN-LU, GAO JIN-TING, LIAO KE-JUN, LIU AN-MIN. STUDIES OF INTERNAL STRESS IN DIAMOND FILMS PREPA-RED BY DC PLASMA CHEMICAL VAPOUR DEPOSITIONJ. Acta Physica Sinica, 1992, 41(11): 1906-1912. DOI: 10.7498/aps.41.1906