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中国物理学会期刊
WANG ZHEN-XIA. A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERINGJ. Acta Physica Sinica, 1994, 43(1): 161-168. DOI: 10.7498/aps.43.161
Citation: WANG ZHEN-XIA. A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERINGJ. Acta Physica Sinica, 1994, 43(1): 161-168. DOI: 10.7498/aps.43.161

A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING

CSTR: 32037.14.aps.43.161
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